Silicon and Silicon Nitride Based Bilayer Polarization-insensitive Optical Filter

Nannan Ning,Xiaofei Wang,Qikai Huang,Hui Yu,Yuehai Wang,Jianyi Yang
DOI: https://doi.org/10.1117/12.2643367
2022-01-01
Abstract:A polarization-insensitive optical filter based on silicon and silicon nitride film is demonstrated. The lateral-shift apodization is introduced to suppress the sidelobes. The fabricated optical filter shows polarization-insensitive performances with large 3dB-bandwidths of 3.5-5.1 nm, low losses of 1.72-1 dB, decent SLSRs of 18.5-19.1 dB for both polarizations.
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