Synthesis And Tribological Properties Of Diamond-Like Carbon Films Prepared On Stainless Steel By Rfpecvd Process

Lin Zeng,Wang Fang,Yue Xiang-Ji,Zhang Yi-Chen,Ba De-Chun,In-Seop Lee
2009-01-01
Abstract:This paper discusses the application of RFPECVD (Radio Frequency Plasma Enhanced Chemical Vapor Deposition) process to DLC (Diamond-like Carbon) film deposition on stainless steel substrate at room temperature. A Ti/TiN/TiC underlayer with functional gradient was pre-deposited on the substrate to play a role of transition interlayer so as to improve the adhesion strength. Then, the DLC film with a certain thickness was thus deposited successfully on the substrate without delamination. Optimizing the deposition parameters, the friction coefficient between DLC film deposited and 100Cr6 steel ball can be lower than 0.20. The wear mechanism of DLC film in the frictional process was studied by means of SEM and Raman microanalysis. The friction-induced graphitization mechanism of DLC film is confirmed by micro-Raman analysis. The observation of good scratch protection for DLC films is very interesting from the point of view of mechanical and frictional applications.
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