Key Technologies Of Machine Tool For Micro Electro, Discharge Machining

Gang Li,Wansheng Zhao,Rui Guo,Yong Zhang,Zhiyong Li,Fuqiang Hu
2007-01-01
Abstract:This paper presents the key technologies of a precision machine tool dedicated for micro electro discharge machining (mu-EDM). The proposed mu-EDM machine tool consists of a high precision granite body, a high precision X-Y-Z stage, a high speed rotary spindle, a micro energy pulse power supply and a microscopic computer vision system. A special CAM software package is developed to generate the electrode tool path and compensate the electrode wear for machining 3D micro structures. Machining experiments show that micro. electrode of circle divide 4 mu m, micro hole of circle divide 10 mu m and complex microstructures have been manufactured stably on this machine.
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