Double Laser Beam Phase Modulating Alignment Method

Hw Ma,Jb Tan
2004-01-01
Abstract:An alignment technique based on double laser beams phase modulating method is proposed in this paper to set up ultra precision linear refenrnce. Double beams compensation alignment is first used in this technique to compensate the parallel excursion and angle excursion, in allusion to the asymmetry of light circuit and the variance of optical component, there are some residual excursions in the compensation results. A phase modulating segment is added after the double laser beam, and the residual parallel excursion could be eliminated effectively. Theoretical analysis and simulation results show that the parallel excursion value less than 200mum could be limited in 3mum when it passing through the phase modulating segment.
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