Nanocoatings Tribology

Df Diao,F Iwata,S Hirono,S Umemura,Yb Xie

2002-01-01

Abstract:For understanding of nanocoatings tribology, POD(Pin on Disk) and AFM(Atomic Force Microscope) tribotests on nano-DLC(Diamond Like Carbon) coatings with 40nm thickness deposited on silicon substrate using ECR(Electron Cyclotron Resonance) sputtering method are investigated. The friction coefficient and the critical frictional cycle for wear life are measured using the POD apparatus. The wear depth and the critical load for spalling are measured using the AFM apparatus. For understanding of the difference between POD and AFM at the point to measure the tribological properties of nanocoatings, the nine types of nano-DLC coatings are chosen to test for the understanding, and the critical frictional cycle for wear life and the critical load for spalling are focused for the testing. For developing a new technology to make the nanocoating for tribological applications, the ECR-sputtering method is introduced. Finally, the paper gives the conclusion that the POD apparatus has a better confidence to estimate the nanocoatings and it would be a better method to study the nanocoatings tribology.