Two-Photon 3d Microfabrication Monitoring System Based On Image Processing And Pattern Recognition

Gao Guohua,Zhu Yu,Duan Guanghong,Wei Peng,Fang Yingxing
2006-01-01
Abstract:Two-photon 3D microfabrication is a new research focusing in MEMS field. The main factors influencing, the whole 3D microstructure fabrication accuracy are discussed in this paper. And a monitoring system to compensate these errors based on image processing and pattern recognition is proposed. The image of solidified cells is sampled by the CCD. Combining with binary image edge detection. the figure parameters of the 3D microstructures will be obtained and the defective positions can be detected. In order to improve the automatic level, Support Vector Machine (SVM) is used to intelligenfly identify the states of the solidified cells. Based on structural risk minimization principle, the recognizing results from SVM provide the important proofs for the error compensation. The monitoring system improves the accuracy and efficiency of the two-photon microfabrication.
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