Three-dimensional Isotropic Microfabrication in Glass Using Spatiotemporal Focusing of High-Repetition-rate Femtosecond Laser Pulses
Yuanxin Tan,Haotian Lv,Jian Xu,Aodong Zhang,Yunpeng Song,Jianping Yu,Wei Chen,Yuexin Wan,Zhaoxiang Liu,Zhaohui Liu,Jia Qi,Yangjian Cai,Ya Cheng
DOI: https://doi.org/10.29026/oea.2023.230066
IF: 8.9329
2023-01-01
Opto-Electronic Advances
Abstract:To improve the processing efficiency and extend the tuning range of 3D isotropic fabrication, we apply the simultaneous spatiotemporal focusing（SSTF） technique to a high-repetition-rate femtosecond（fs） fiber laser system. In the SSTF scheme, we propose a pulse compensation scheme for the fiber laser with a narrow spectral bandwidth by building an extra-cavity pulse stretcher. We further demonstrate truly 3D isotropic microfabrication in photosensitive glass with a tunable resolution ranging from 8 μm to 22 μm using the SSTF of fs laser pulses. Moreover, we systematically investigate the influences of pulse energy, writing speed, processing depth, and spherical aberration on the fabrication resolution. As a proof-of-concept demonstration, the SSTF scheme was further employed for the fs laser-assisted etching of complicated glass microfluidic structures with 3D uniform sizes. The developed technique can be extended to many applications such as advanced photonics, 3D biomimetic printing, micro-electromechanical systems, and lab-on-a-chips.