Femtosecond Laser 3D Microfabrication with Single Exposure or 1D Scanning

Yan Li,Dong Yang,Qian Zhang,Hong Yang,Qihuang Gong

DOI: https://doi.org/10.1364/assl.2019.jw2a.52

2019-01-01

Abstract:Femtosecond laser microfabrication of a 3D microstructure with single-exposure or 1D scanning is realized by the 3D focal field intensity engineering. The two rapid techniques can be switched to fabricate a complex microstructure.

What problem does this paper attempt to address?

Rapid Femtosecond Laser 3D Microfabrication Using Focal Field Engineering

Yan Li,Dong Yang,Lipu Liu,Hong Yang,Qihuang Gong

DOI: https://doi.org/10.1364/cleo_si.2019.sf3g.6

2019-01-01

Abstract:We realize the single-exposure and the single-scan femtosecond laser microfabrication of 3D microstructures by the 3D focal field intensity engineering. The two rapid techniques are further integrated to fabricate a microstructure. © 2019 The Author(s)
Femtosecond Laser Nano/microfabrication Via Three-Dimensional Focal Field Engineering

Yan Li,Lipu Liu,Dong Yang,Qian Zhang,Hong Yang,Qihuang Gong

DOI: https://doi.org/10.1117/12.2249533

2017-01-01

Abstract:In the conventional femtosecond laser direct writing with a Gaussian beam, the focus is an ellipsoid with the long axis along the beam propagation direction, resulting in the ellipsoidal fabricated dot. Due to the simple shape of the dot, complex three-dimensional (3D) nano/microstructures should be written dot by dot by the focus scanning, which is usually timeconsuming. Therefore, a rapid nano/microfabrication technique is becoming highly desired to achieve arbitrary 3D nano/microstructures. By 2D phase modulation of the Gaussian beam, multi-focuses were generated for the direct writing of several same nano/microstructures simultaneously to save fabrication time, and donut and other 2D intensity distributions were produced for the single exposure fabrication of 2D microstructures. Here, we demonstrate the singleexposure two-photon polymerization of a 3D microstructure via the 3D focal field engineering by using the 2D phase-only spatial light modulation. With a single exposure, a whole 3D microstructure like a double-helix is polymerized simultaneously, whose configuration is controlled by the designed 3D focal intensity distribution. In addition, a longitudinal circular intensity distribution is generated for the multi-photon inscription of a depressed cladding waveguide inside glass with single scan transverse writing.
Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Min Wang,Jintian Lin,Yingxin Xu,Zhiwei Fang,Lingling Qiao,Z. Liu,Wei Fang,Ya Cheng

DOI: https://doi.org/10.1016/j.optcom.2016.05.025

IF: 2.4

2017-01-01

Optics Communications

Abstract:Femtosecond laser micromachining has been a promising technique for fabricating three-dimensional (3D) micro/nano-structures in various kinds of dielectric materials with unprecedented spatial resolutions as well as flexibility in terms of the geometry and the materials can be processed. This unique capability opens opportunities for fabrication of 3D high-quality (Q) microresonators, which are one of the key elements in modern photonic applications. Here, we review the recent progress in fabrication of high-Q microresonators on glass and crystalline substrates by employing femtosecond laser direct writing. We demonstrate the applications of the fabricated microresonators in generating low-threshold lasers, high-sensitivity chemical sensing and nonlinear optical wavelength conversion.
Femtosecond laser irradiation for functional micro-/nanostructure fabrication

minghui hong,zaichun chen,min tang,luping shi,t c chong

DOI: https://doi.org/10.1109/CLEOPR.2009.5292198

2009-01-01

Abstract:Femtosecond laser is a unique processing tool to make micro-/nanostructures on heat sensitive bio-polymer film & glass substrate, to create 3D structures inside glass, to achieve 20-nm nanostructuring and large-area THz, micro-mold and micro-device patterning.
Micro-fabrication technology by femtosecond laser direct scanning using two-photon photo-polymerization

Ming Zhou,Lipeng Liu,Qixun Dai,Chuan Peng Pan

DOI: https://doi.org/10.1117/12.574589

2005-01-01

Abstract:Two-photon absorption (TPA) is confined at the focus under tight-focusing conditions, which provides a novel concept for micro-fabrication using two-photon photo-polymerization in resin. The development of three-dimensional micro-fabrication by femtosecond laser was introduced at first, then the merits of femtosecond two-photon photo-polymerization was expatiated. Femtosecond laser direct scanning three-dimensional (3D) micro-fabrication system was set up and corresponding controlling software was developed. We demonstrated a fabrication of three-dimensional microstructures using photo-polymerization of resin by two-photon absorption. The precision of micro-machining and the spatial resolution reached 1um because of TPA. The dependence of fabricated line width to the micro-fabrication speed was investigated. Benzene ring, CHINA and layer-by-layer of log structures were fabricated in this 3D- micro-fabrication system as examples.
Micro-Fabrication and Monitoring of Three-Dimensional Microstructures Based on Laser-Induced Thermoplastic Formation

Leyan Wang,Dongxian Zhang,Zhenghu Wen,Haijun Zhang

DOI: https://doi.org/10.1002/jemt.20722

2009-01-01

Microscopy Research and Technique

Abstract:This article reports a novel laser-induced micro-fabrication method and its monitoring system for three-dimensional (3D) microstructures. The mechanism of the method is that a small zone of thermoplastic material melted by laser heating grows in liquid surrounding environment, solidifying into a convex microstructure, such as micro-dot or micro-pillar. A laser diode (808 nm) with maximum power output of 130 mW is used as power source, and a kind of paraffin mixed with stearic acid and paint serves as the thermoplastic material for 3D microstructure formation experiments. A light microscope system consisting of a charge-coupled device (CCD) and a computer is utilized to realize real-time observation of the micro-fabricating process. The distribution of local temperature rise on material surface created by laser irradiation is simulated. The effects of liquid environment on microstructure formation have been theoretically analyzed and experimentally studied. Experiments are further carried out to investigate the relationship between laser spot and fabricated microstructures. The results indicate that the widths of microdots or micro-pillars are mostly determined by the size of focal spot, and their heights increase with the enlargement of laser power density. With this method, a micro-dot array of Chinese characters meaning "China" has been successfully fabricated through computer programming. This method has the advantages of implementing direct, mask-less, real-time and inexpensive 3D microstructure fabrication. Therefore, it would be widely applied in the fields of micro/nano-technology for practical fabrication of different kinds of 3D microstructures. Microsc. Res. Tech. 72:717-722, 2009. (C) 2009 Wiley-Liss, Inc.
Three-dimensional Microfabrication in Transparent Materials with Femtosecond Laser Pulses

李焱,蒋红兵,杨宏,龚旗煌

DOI: https://doi.org/10.3969/j.issn.1007-5461.2004.02.009

2004-01-01

Abstract:Fabrication of three-dimensional microstructures and microdevices based on femtosecond laser modification and machining of transparent materials has attracted much attention. Microfabrication techniques and their applications are introduced, including femtosecond laser induced refractive index change for fabrication of optical waveguides, gratings and couplers; microexplosion inside materials for three-dimensional bit-oriented storage and other dot-arrayed structures; interface ablation for drilling, cutting and etching; two-photon polymerization for microlens, photonic cryatals and diffractive optical elements.
Femtosecond Laser 3d Micromachining: A Powerful Tool for the Fabrication of Microfluidic, Optofluidic, and Electrofluidic Devices Based on Glass

Koji Sugioka,Jian Xu,Dong Wu,Yasutaka Hanada,Zhongke Wang,Ya Cheng,Katsumi Midorikawa

DOI: https://doi.org/10.1039/c4lc00548a

IF: 7.517

2014-01-01

Lab on a Chip

Abstract:Femtosecond laser micromachining can directly fabricate three-dimensional (3D) microfluidic devices integrated with functional microcomponents in glass microchips.
Rapid Two‐Photon Polymerization of an Arbitrary 3D Microstructure with 3D Focal Field Engineering

Dong Yang,Lipu Liu,Qihuang Gong,Yan Li

DOI: https://doi.org/10.1002/marc.201900041

IF: 5.006

2019-01-01

Macromolecular Rapid Communications

Abstract:Two-photon polymerization is a powerful method for three-dimensional (3D) precision nanofabrication. To facilitate the fabrication speed, for the first time, single-exposure or single-scan two-photon polymerization of an arbitrary 3D microstructure with smaller or larger volume is demonstrated through focal field engineering. The constraints and the initial conditions of the Gerchberg-Saxton algorithm for the retrieval of the incident wavefront are adapted for the shape fidelity and the smoothness of the 3D focal field intensity distribution. As a result, a small 3D microstructure can be polymerized by a single exposure within 0.1 s, while a larger one can be formed by continuous polymerization of slices of the structure with one-dimensional single scan with a speed of 6 µm s-1 . The microlenses that generate vortex beams with different orbital angular momentums are polymerized to demonstrate the high fabrication precision. These pave the way for the rapid two-photon polymerization of arbitrary 3D structures.
Rapid two-photon polymerization of arbitrary 3D microstructure with femtosecond laser 3D focal field engineering

Linyu Yan,Dong Yang,Qihuang Gong,Yan Li

DOI: https://doi.org/10.1117/12.2602350

2021-10-09

Abstract:Femtosecond laser direct writing via two-photon polymerization (TPP), which utilizes high intensity laser induced two-photon absorption to initiate polymerization, is a promising approach for 3D microstructure fabrication especially micro-optical devices. The traditional point-by-point direct writing TPP has high spatial resolution but usually timeconsuming[1], thus it is hard to fabricate large structures or arrays. Recently, several solutions have been proposed to facilitate the polymerization, for instance, the multi-focus generation for parallel processing but the interference between foci limits their density[2], the multi-beam interference for specific periodic structures[3], and the focal field engineering[4,5]. In this work, we fabricate arbitrary 3D structures with the focal field engineering (FFE) by inversely retrieving the incident beam profile from the target focal field to speed up the polymerization of the microstructures. Moreover, we anneal the structure as post heat treatment to improve its smoothness of the surface.
Microfabrication by Femtosecond Laser Irradiation

H Misawa,HB Sun,S Juodkazis,M Watanabe,S Matsuo

DOI: https://doi.org/10.1117/12.387561

2000-01-01

Abstract:Femtosecond (fs) laser microfabrication has been gathering more research interests due to its ability to create micro- and sub-micrometer 3D structures. An extremely high light intensity enables multiphoton absorption in transparent materials, upon which the spatial resolution of fabricated elements is confined to the sizes even smaller than optical diffraction limit. Our report will formulate the principles of the laser microfabrication of such applications. A direct application of single-shot pulse-induced optical damage is a 3D optical memory with a storage density of ca. 100 Gbits/cm2 in silica. Photonic and optoelectronic applications such as optical gratings, 3D inlayed-'atom'- like and 2D cylinder-consisted photonic crystals have been fabricated in silica. Also, photopolymerization of photoresist by a scanning of focal point of laser irradiation solidifies submicrometer rods, which forms photonic lattices when packed into well-defined 3D pattern. Photonic bandgap effects of above-mentioned structures were corroborated by IR Fourier spectroscopy and numerical simulations, by which the success of laser microfabrication was evidenced. Self-focusing of fs-pulses is another possibility of the microstructuring of transparent materials, which is demonstrated in the case of silica. This could find its application in sub-diffraction-limited recording.
Etching-assisted Femtosecond Laser Microfabrication

Monan Liu,Mu-Tian Li,Han Yang,Hong-Bo Sun

DOI: https://doi.org/10.1088/1674-1056/27/9/094212

2018-01-01

Chinese Physics B

Abstract:Although femtosecond laser microfabrication is one of the most promising three- dimensional (3D) fabrication techniques, it could suffer from low fabrication efficiency for structures with high 3D complexities. By using etching as a main assistant technique, the processing can be speeded up and an improved structure surface quality can be provided. However, the assistance of a single technique cannot satisfy the increasing demands of fabrication and integration of highly functional 3D microstructures. Therefore, a multi-technique-based 3D microfabrication method is required. In this paper, we briefly review the recent development on etching-assisted femtosecond laser microfabrication (EAFLM). Various processing approaches have been proposed to further strengthen the flexibilities of the EAFLM. With the use of the multi-technique-based microfabrication method, 3D microstructure arrays can be rapidly defined on planar or curved surfaces with high structure qualities.
Fabrication of Three-Dimensional Micro-Structures with Two-Photon Absorption by Femtosecond Laser

Ming Zhou,Haifeng Yang,Lipeng Liu,Lan Cai

DOI: https://doi.org/10.4028/www.scientific.net/msf.532-533.568

2006-01-01

Materials Science Forum

Abstract:The photo-polymerization induced by Two-Photon Absorption (TPA) is tightly confined in the focus because the efficiency of TPA is proportional to the square of intensity. Three-dimensional (3D) micro-fabrication can be achieved by controlling the movement of the focus. Based on this theory, a system for 3D-micro-fabrication with femtosecond laser is proposed. The system consists of a laser system, a microscope system, a real-time detection system and a 3D-movement system, etc. The precision of micro-machining reaches a level down to 700nm linewidth. The line width was inversely proportional to the fabrication speed, but proportional to laser power and NA. The experiment results were simulated, beam waist of 0.413μm and TPA cross section of 2×10-54cm4s was obtained. While we tried to optimize parameters, we also did some research about its applications. With TPA photo-polymerization by means of our experimental system, 3D photonic crystal of wood-pile structure twelve layers and photonic crystal fiber are manufactured. These results proved that the micro-fabrication system of TPA can not only obtain the resolution down to sub-micron level, but also realize real 3D micro-fabrication.
FEMTOSECOND LASER APPLICATIONS IN THREE-DIMENSIONAL MICRO-SYSTEMS

Cheng-de LI,Dan-Ling WANG,Le LUO,Hong YANG,Qi-Huang GONG

DOI: https://doi.org/10.3321/j.issn:0379-4148.2000.12.004

2000-01-01

Physics

Abstract:Femtosecond lasers exhibit great advantages in t hree-dimensional microfabrication and ophthalmic surgery since they can machine materials with very high resolution and precision due to their ultrashort pulse duration and ultrahigh peak intensity.Recent developments of the applications of femtosecond lasers in three-dimensional microfabrication of high density 3- D optical data storage,wave guides and photonic crystals,and in refractive sur gery,glaucoma treatment and cataract surgery are reviewed.Femtosecond laser th ree-dimensional microfabrication technology will be extensively used in microel ectronics,computer science,optical communication and biomedicine fields.
High-Resolution Femtosecond Laser 3d Micromachining Using Low-Na Focusing Systems

Wei Chu,Peng Wang,Lingling Qiao,Wenbo Li,Yuanxin Tan,Ya Cheng

DOI: https://doi.org/10.1117/12.2516203

2019-01-01

Abstract:Low-NA focusing systems can offer longer working distances than the high-NA ones, thereby enabling fabrication of 3D structures of great heights/thicknesses. However, degradation of the longitudinal resolution occurs at low NAs as a consequence of diffraction of the light waves. Here, we report on high-resolution laser printing of three dimensional (3D) structures of heights up to a few centimeters with a sub-10 mu m longitudinal resolution by incorporating a simultaneous spatiotemporal focusing (SSTF) scheme into the femtosecond laser direct writing. Remarkably, the SSTF can ensure generation of symmetric focal spots (i.e., spherical focal spots) of comparable sizes along both the horizontal and vertical directions. The resolutions are tunable in real time by dynamically varying the power of the writing laser beam. The ability to simultaneous achieving the large heights and high longitudinal resolutions in femtosecond laser 3D micromachining is of great use for applications ranging from microfluidics to infrared and THz photonics.
Real-Time in Situ Compensation for Femtosecond Laser Two-Photon 3D Microfabrication

Guohua Gao,Yu Zhu,Guanghong Duan,Yingxing Fang,Xiaoquan Wei

DOI: https://doi.org/10.1115/mnc2007-21160

2007-01-01

Abstract:Femtosecond (fs) laser Two-photon Microfabrication is a new real 3D microstructure fabricating method with sub-micron resolution power. In the fabricating process, some factors cause the appearance of the final microstructures different from the design figure. In order to eliminate the appearance error and improve the machining precision, in this paper, two machining defect factors are discussed and real-time in situ compensation is realized based on machine vision monitoring and pattern recognition technique. For the position error induced by the movement error of the 3D micro-displacement scanning stage and the fluid of the liquid resin, one relative distance reference mark system is built to compensate the error. Through the CCD vision monitoring system, at the beginning of every layer fabrication, the 3D scanning stage should be re-posited and ensure the relative positions to the reference marks are right. For the other defect factor, deficient exposure, with the image processing and pattern recognition techniques, the solidified degree of the resin cell can be automatically judged and re-exposure process will be done. This method decreases the accumulative error and is evidently available for the 3D microstructure with larger height value.
Rapid Fabrication Of Continuous Surface Fresnel Microlens Array By Femtosecond Laser Focal Field Engineering

Linyu Yan,Dong Yang,Qihuang Gong,Yan Li

DOI: https://doi.org/10.3390/mi11020112

IF: 3.4

2020-01-01

Micromachines

Abstract:Femtosecond laser direct writing through two-photon polymerization has been widely used in precision fabrication of three-dimensional microstructures but is usually time consuming. In this article, we report the rapid fabrication of continuous surface Fresnel lens array through femtosecond laser three-dimensional focal field engineering. Each Fresnel lens is formed by continuous two-photon polymerization of the two-dimensional slices of the whole structure with one-dimensional scan of the corresponding two-dimensional engineered intensity distribution. Moreover, we anneal the lens array to improve its focusing and imaging performance.
3D Microstructure Manufacture Based on Laser-Induced Thermoplastic Expansion

Wang Leyan,Zhang Dongxian,Zhang Haijun

DOI: https://doi.org/10.1109/metamat.2006.335069

2006-01-01

Abstract:In this paper, we describe a novel technology for three dimensional (3D) microstructure manufacture, which is based on the laser-induced thermoplastic expansion. A thermoplastic material melted by laser heating grows in the surrounding space filled with liquid, and after the laser irradiation is switched off, it immediately solidifies into a protuberant shape because of the heat release to the liquid surroundings. The size of 3D microstructure is controlled by the parameter of laser irradiation, including focal spot diameter, power density and irradiation time. This technology does not require expensive equipments or complicated steps, like molding, masking or bonding. We can fabricate microstructures swiftly, with a low cost. We have developed the experiment setup, which consists of laser, optical components and liquid container. And paraffin dots have been manufactured with this experiment setup.
Laser Nanofabrication: Applications in Micro-Optics, Micro-Electronics, Micromachines, and Microfluidics

Chen, Qi-Dai,Xia, Hong,Yong-Lai Zhang,Sun, Hong-Bo

DOI: https://doi.org/10.1109/cleoe.2011.5943341

2011-01-01

Abstract:Femtosecond laser micronanofabrication has been considered as a promising approach for complicated device fabrication in versatile fields due to its intrinsic three-dimensional (3D) prototyping capability and reasonably high fabrication accuracy up to tens of nanometers. However, the unique features haven't been fully demonstrated yet so far. Our research in the passed several years has been focused in exploring applications of delicate technology in micro-optics, microelectronics, micromachines and microfluidics. Significant progress has been achieved. Successful examples include but not limited to aspheric microlens arrays with 100% filling ratio and numerical aperture as high as 0.5, nonplanar metal nanowiring technology, flexible circuits of graphene, remotely magnetically controllable micromachine, and microfilter and microturbines for microfluidic channels. Details on the fabrication and characterizations on these devices will be presented.
Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale

Zhenyuan Lin,Minghui Hong

DOI: https://doi.org/10.34133/2021/9783514

2021-12-01

Ultrafast Science

Abstract:As a noncontact strategy with flexible tools and high efficiency, laser precision engineering is a significant advanced processing way for high-quality micro-/nanostructure fabrication, especially to achieve novel functional photoelectric structures and devices. For the microscale creation, several femtosecond laser fabrication methods, including multiphoton absorption, laser-induced plasma-assisted ablation, and incubation effect have been developed. Meanwhile, the femtosecond laser can be combined with microlens arrays and interference lithography techniques to achieve the structures in submicron scales. Down to nanoscale feature sizes, advanced processing strategies, such as near-field scanning optical microscope, atomic force microscope, and microsphere, are applied in femtosecond laser processing and the minimum nanostructure creation has been pushed down to ~25 nm due to near-field effect. The most fascinating femtosecond laser precision engineering is the possibility of large-area, high-throughput, and far-field nanofabrication. In combination with special strategies, including dual femtosecond laser beam irradiation, ~15 nm nanostructuring can be achieved directly on silicon surfaces in far field and in ambient air. The challenges and perspectives in the femtosecond laser precision engineering are also discussed.

Femtosecond Laser 3D Microfabrication with Single Exposure or 1D Scanning

Rapid Femtosecond Laser 3D Microfabrication Using Focal Field Engineering

Femtosecond Laser Nano/microfabrication Via Three-Dimensional Focal Field Engineering

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Femtosecond laser irradiation for functional micro-/nanostructure fabrication

Micro-fabrication technology by femtosecond laser direct scanning using two-photon photo-polymerization

Micro-Fabrication and Monitoring of Three-Dimensional Microstructures Based on Laser-Induced Thermoplastic Formation

Three-dimensional Microfabrication in Transparent Materials with Femtosecond Laser Pulses

Femtosecond Laser 3d Micromachining: A Powerful Tool for the Fabrication of Microfluidic, Optofluidic, and Electrofluidic Devices Based on Glass

Rapid Two‐Photon Polymerization of an Arbitrary 3D Microstructure with 3D Focal Field Engineering

Rapid two-photon polymerization of arbitrary 3D microstructure with femtosecond laser 3D focal field engineering

Microfabrication by Femtosecond Laser Irradiation

Etching-assisted Femtosecond Laser Microfabrication

Fabrication of Three-Dimensional Micro-Structures with Two-Photon Absorption by Femtosecond Laser

FEMTOSECOND LASER APPLICATIONS IN THREE-DIMENSIONAL MICRO-SYSTEMS

High-Resolution Femtosecond Laser 3d Micromachining Using Low-Na Focusing Systems

Real-Time in Situ Compensation for Femtosecond Laser Two-Photon 3D Microfabrication

Rapid Fabrication Of Continuous Surface Fresnel Microlens Array By Femtosecond Laser Focal Field Engineering

3D Microstructure Manufacture Based on Laser-Induced Thermoplastic Expansion

Laser Nanofabrication: Applications in Micro-Optics, Micro-Electronics, Micromachines, and Microfluidics

Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale