Abstract:Background: Femtosecond laser provides a versatile tool for micro-and nanofabrication, such as periodic surface structures with a periodicity much less than the wavelength, microfluidic channels for biological uses, photonic metamaterials and optical integrated circuits for quantum applications. These facts prove that fabrication methods based on femtosecond laser have provided convenience for novel applications in the fields of high precision fabrication, experimental quantum physics, functional materials, etc.Methods: We focus on the novel applications of the femtosecond laser high precision fabrication, such as quantum integrated circuits, biological and medical devices, multifunctional surfaces and functional periodic arrays. These applications are mostly undertook this 5 years, especially the quantum integrated circuits which were studied since 2013. Moreover, case studies were shown to illustrate the representative results and study methods.Results: We have reviewed 128 papers that are associated with the novel applications and case studies. Approximate 50% papers introduced the novel applications in the fields of quantum integrated circuits, biological and medical devices, multifunctional surfaces and functional periodic arrays. Other papers presented illustrated the case studies including femtosecond laser-induced forward transfer, characterization of femtosecond laser-induced periodic surface structures and results led by femtosecond vortex beam generated by a q-plate.Conclusion: The applications of the technology of the femtosecond laser direct writing waveguides in the fields of integrated quantum optics, photonic metamaterials, biological and medical circuits will surely pave a new way to fabricate full-size quantum computer and provide enormous kinds of biomimetic and medical finer devices. These state-of-the-art microdevices will provide much more convenience than before and even probably overturn the structure of the modern industry society. With the development of the relative technologies, femtosecond laser will prominently enhance the level of the fabrication in particular fields.

FEMTOSECOND LASER APPLICATIONS IN THREE-DIMENSIONAL MICRO-SYSTEMS

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Three-Dimensional Microfabrication by Shaped Femtosecond Laser Pulses

Research Progress on Preparation of Three-Dimensional Micro-Nano Connected Structures in Transparent Materials by Femtosecond Laser Material Reduction Method

Femtosecond Laser Applications In Micro/Nano Science And Technology: Nonlinear Effects In Photonic Crystal Fibers, Femtosecond Laser-Induced Forward Transfer, And Femtosecond Laser Manipulation System For Biology

Mechanisms of Femtosecond Laser Interaction with Biological Tissues and Its Applications

Three-dimensional Microfabrication in Transparent Materials with Femtosecond Laser Pulses

Application of Micro-Optical Components Fabricated with Femtosecond Laser

Femtosecond laser irradiation for functional micro-/nanostructure fabrication

Three-dimensional femtosecond laser processing for lab-on-a-chip applications

Recent Progress in Femtosecond Pulsed Laser Processing Research

Laser Nanofabrication: Applications in Micro-Optics, Micro-Electronics, Micromachines, and Microfluidics

Femtosecond laser micromachining optical devices

Laser Ablation and Micromachining with Femtosecond Laser Pulse

High-Resolution Femtosecond Laser 3d Micromachining Using Low-Na Focusing Systems

Femtosecond Laser 3d Micromachining: A Powerful Tool for the Fabrication of Microfluidic, Optofluidic, and Electrofluidic Devices Based on Glass

Femtosecond Laser Integration for Biophotonic Applications — A “magic Brush” in the Micro/nano-World

Femtosecond Laser High Precision Fabrication for Novel Applications

Application of Femtosecond Laser in Ocular Surgery.

Femtosecond Laser Micro/nano Processing: From Fundamental to Applications

Applications of Femtosecond Laser in Biology