High-Q Resonance Implementation with Mini-Scale High-Index-Contrast Grating on Silicon-on-Insulator

Zhixin Wang,Haiyang Zhang,Jicheng Jin,Xuefan Yin,Jiaxin Lv,Chao Peng,Weiwei Hu

DOI: https://doi.org/10.1364/acpc.2016.as3f.3

2016-01-01

Abstract:We demonstrate a high-Q resonance achieved on a mini-scale HCG ( 110 μm×300 μm) with the measured Q of ~2420, revealing that in-plane energy leakage and finite-size effect will not destroy high-Q resonance.

What problem does this paper attempt to address?

Fabrication of High-Q Crystalline Microresonators by Femtosecond Laser Direct Writing for Phase Matched Second Harmonic Generation

Jintian Lin,Yingxin Xu,Zhiwei Fang,Min Wang,Wei Fang,Ya Cheng

DOI: https://doi.org/10.1117/12.2211895

2016-01-01

Abstract:We report on phase matched second harmonic generation (SHG) in an on-chip high-Q lithium niobate (LN) microresonator fabricated by femtosecond laser. Highly efficient SHG process was demonstrated with a normalized conversion efficiency of 1.106×10 −3 /mW.
High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Ping Yu,Huiye Qiu,Hui Yu,Feiqing Wu,Zhuoyuan Wang,Xiaoqing Jiang,Jianyi Yang

DOI: https://doi.org/10.1109/lpt.2016.2581205

IF: 2.6

2016-01-01

IEEE Photonics Technology Letters

Abstract:We demonstrate the design, fabrication, and characterization of side-coupled airmode nanobeam photonic crystal cavities in silicon-on-insulator platform. Results show that repeatable devices achieve similar high loaded quality factors (>10(4)) and large optical energy ratio in low refractive region. The unload Q-factors of the fabricated cavities are estimated to exceed 10(5). With side-coupled configuration, high transmission of through port is achieved with typical insertion loss less than 0.5 dB. Wavelength shifts of the measured resonances with respect to the designed values are observed and well explained by considering the fluctuation of etching depth. The demonstrated side-coupled airmode nanobeam photonic crystal cavities may find their applications in ultracompact integrated photonics, especially for on-chip photonic sensor, notch filter, or optical switch.
Mode Splitting in High-Index-contrast Grating with Mini-Scale Finite Size.

Zhixin Wang,Liangfu Ni,Haiyang Zhang,Hanxing Zhang,Jicheng Jin,Chao Peng,Weiwei Hu

DOI: https://doi.org/10.1364/ol.41.003872

IF: 3.6

2016-01-01

Optics Letters

Abstract:The mode-splitting phenomenon within finite-size, mini-scale high-index-contrast gratings (HCGs) has been investigated theoretically and experimentally. The high-Q resonance splits into a series of in-plane modes due to the confinement of boundaries but can still survive even on a mini-scale footprint. Q factors up to similar to 3300 and similar to 2200 have been observed for the HCGs with footprints that are only 55 mu m x 300 mu m and 27.5 mu m x 300 mu m, which would be promising for realizing optical communication and sensing applications with compact footprint. (C) 2016 Optical Society of America
High- Q Photonic Crystal Cavity in a Single-Mode Silicon Ridge Waveguide

Yu Ping,Qiu Chen,Hu Ting,Qiu Hui-Ye,Ge Fang-Fang,Jiang Xiao-Qing,Yang Jian-Yi

DOI: https://doi.org/10.1088/0256-307x/30/10/104204

2013-01-01

Abstract:We demonstrate experimentally a high-Q one-dimensional photonic crystal cavity in a widely-used 450 × 220nm single mode silicon ridge waveguide. Transmission spectrum measurement is performed by using the vertical fiber-grating coupling characterization method. The Q factor up to 2.6 × 104 is found by fitting the line shape of the transmission spectrum, and the normalized transmission of nearly 20% is achieved. Three-dimensional finite difference time domain calculations show that the modal volume of the fundamental mode is 1.1(λ/n)3. With the standard silicon waveguide width, the demonstrated 1D PhC cavity may be used as a building block for integrated photonic circuits and on-chip sensing applications.
Demonstration of High-Q Mid-Infrared Chalcogenide Glass-On-Silicon Resonators

Hongtao Lin,Lan Li,Yi Zou,Sylvain Danto,J. David Musgraves,Kathleen Richardson,Stephen Kozacik,Maciej Murakowski,Dennis Prather,Pao T. Lin,Vivek Singh,Anu Agarwal,Lionel C. Kimerling,Juejun Hu

DOI: https://doi.org/10.1364/ol.38.001470

IF: 3.6

2013-01-01

Optics Letters

Abstract:We demonstrated high-index-contrast, waveguide-coupled As2Se3 chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2×10(5) at 5.2 μm wavelength, which is among the highest values reported in on-chip mid-infrared (mid-IR) photonic devices. The resonator can serve as a key building block for mid-IR planar photonic circuits.
Diffractive Broadband Coupling into High-Q Resonant Cavities

Hongtao Lin,Xiaochen Sun,Jifeng Liu,Juejun Hu

DOI: https://doi.org/10.1364/ol.40.002377

2015-01-01

Abstract:Optical resonators with high-quality factors (Q-factor) constitute the main building block for many photonic devices capitalizing on light-matter interactions, ranging from light emitters to biochemical sensors. While a high Q-factor enhances light-matter interactions, it also limits the device operation bandwidth. Here we propose and numerically analyze a generic coupling scheme to overcome the apparent trade-off. By using an orthogonal grating, broadband optical coupling into high-Q cavities of diverse geometric configurations can be achieved. As an example, the approach is applied to demonstrate over a 28-fold optical absorption enhancement across a 150 nm band around 900 nm wavelength in single-layer graphene embedded inside a Fabry-Perot cavity.
Dry-etched Ultrahigh-Q Silica Microdisk Resonators on a Silicon Chip

Jiaxin Gu,Jie Liu,Ziqi Bai,Han Wang,Xinyu Cheng,Guanyu Li,Menghua Zhang,Xinxin Li,Qi Shi,Min Xiao,Xiaoshun Jiang

DOI: https://doi.org/10.1364/prj.412840

IF: 7.6

2021-01-01

Photonics Research

Abstract:We demonstrate the fabrication of ultrahigh quality (Q) factor silica microdisk resonators on a silicon chip by inductively coupled plasma (ICP) etching. We achieve a dry-etched optical microresonator with an intrinsic Q factor as high as 1.94 × 10 8 from a 1-mm-diameter silica microdisk with a thickness of 4 μm. Our work provides a chip-based microresonator platform operating in the ultrahigh-Q region that will be useful in nonlinear photonics such as Brillouin lasers and Kerr microcombs.
Demonstration of High-Performance, Sub-Micron Chalcogenide Glass Photonic Devices by Thermal Nanoimprint

Yi Zou,Loise Moreel,Jie Zhou,Danning Zhang,Hongtao Lin,Lan Li,Qingyang Du,Juejun Hu,Sylvain Danto,Kathleen Richardson,J. David Musgraves,Kevin D. Dobson,Robert Birkmire

DOI: https://doi.org/10.1117/12.2040454

2014-01-01

Abstract:High-index-contrast optical devices form the backbone of densely integrated photonic circuits. While these devices are traditionally fabricated using lithography and etching, their performance is often limited by defects and sidewall roughness arising from fabrication imperfections. This paper reports a versatile, roll-to-roll and backend compatible technique for the fabrication of high-performance, high-index-contrast photonic structures in composition-engineered chalcogenide glass (ChG) thin films. Thin film ChG have emerged as important materials for photonic applications due to their high refractive index, excellent transparency in the infrared and large Kerr non-linearity. Both thermally evaporated and solution processed As-Se thin films are successfully employed to imprint waveguides and micro-ring resonators with high replicability and low surface roughness (0.9 nm). The micro-ring resonators exhibit an ultra-high quality-factor of 4 x 10(5) near 1550 nm wavelength, which represents the highest value reported in ChG micro-ring resonators. Furthermore, sub-micron nanoimprint of ChG films on non-planar plastic substrates is demonstrated, which establishes the method as a facile route for monolithic fabrication of high-index-contrast devices on a wide array of unconventional substrates.
Single-Mode Silicon-On-Insulator Elliptical Microdisk Resonators with High Q Factors

Kang Xiong,Xi Xiao,Yingtao Hu,Zhiyong Li,Tao Chu,Yude Yu,Jinzhong Yu

DOI: https://doi.org/10.1117/12.920503

2011-01-01

Abstract:We propose and demonstrate a novel elliptical microdisk resonator which enables single-mode operation with high quality (Q) factor. Such elliptical microdisk resonators with pedestal, which consist of plenty of smoothly changing bends with modified curvature radii, can easily achieve single-mode operation due to selective losses introduced by mode transmission mismatches and small curvature radii portion inside the elliptical microdisks. We fabricated the devices on silicon-on-insulator (SOI) platform. Single-mode resonance with high quality factor (Q) of ~105 was experimentally realized. Besides, the proposed elliptical microdisk provides larger coupling strength compared to normal circular microdisk, and hence enables critical coupling with easy-to-fabricate gaps.
An Ultrahigh-Q Microresonator on 4H-silicon-carbide-on-insulator Platform for Multiple Harmonics, Cascaded Raman Lasing and Kerr Comb Generations

Chengli Wang,Zhiwei Fang,Ailun Yi,Bingcheng Yang,Zhe Wang,Liping Zhou,Chen Shen,Yifan Zhu,Yuan Zhou,Rui Bao,Zhongxu Li,Yang Chen,Kai Huang,Jiaxiang Zhang,Ya Cheng,Xin Ou

DOI: https://doi.org/10.48550/arXiv.2105.02533

2021-05-06

Optics

Abstract:The realization of ultrahigh quality (Q) resonators regardless of the underpinning material platforms has been a ceaseless pursuit, because the high Q resonators provide an extreme environment of storage of light to enable observations of many unconventional nonlinear optical phenomenon with high efficiencies. Here, we demonstrate an ultra-high Q factor (7.1*10^6) microresonator on the 4H-silicon-carbide-on-insulator (4H-SiCOI) platform in which both \c{hi}^(2) and \c{hi}^(3) nonlinear processes of high efficiencies have been generated. Broadband frequency conversions, including second-, third-, fourth-harmonic generation were observed. Cascaded Raman lasing was demonstrated in the SiC microresonator for the first time to the best of our knowledge. Broadband Kerr frequency combs covering from 1300 to 1700 nm were achieved using a dispersion-engineered SiC microresonator. Our demonstration is a significant milestone in the development of SiC photonic integrated devices.
Concentric Silicon Micro-Ring Resonators with Enhanced Transmission Notch Depth

Xiaohui Li,Ziyang Zhang,Qiang Li,Min Qiu,Yikai Su

DOI: https://doi.org/10.1117/12.804230

2008-01-01

Abstract:In this work, we have analyzed, fabricated and demonstrated concentric micro-ring resonators in silicon-on-insulator (SOI) structure for enhanced transmission notches. The operation principles of the concentric ring resonators are studied by time-domain coupled-mode theory. Directional coupling between concentric rings offers another freedom in designing deep notch optical filters and ultra-sensitive biosensors. The finite-difference-time-domain (FDTD) simulations have shown the improvement of the notch depth, evenly distributed mode field and the effect of the resonance shift. The device is demonstrated in silicon-on-insulator structure. Transmission notch depth improvement of ~ 15dB is demonstrated for the 21-20.02-μm-radius double-ring structure comparing with the single 21-μm-radius ring.
Fabrication-friendly High-Efficiency Silicon Nitride Grating Coupler

Pengfei Xu,Yanfeng Zhang,Zengkai Shao,Lin Liu,Lidan Zhou,Chunchuan Yang,Yujie Chen,Siyuan Yu

DOI: https://doi.org/10.1109/cleopr.2017.8118727

2017-01-01

Abstract:Grating coupler, as one of the key components can provide convenient on-wafer testing and packaging for integrated photonics. Silicon nitride (SiNx) grating coupler suffers from lower efficiency due to the relative low material refractive index. The efficiency of SiNx grating coupler can be improved by using high reflectivity silicon grating reflectors underneath. However, such silicon grating reflector requires several fabrication steps, including lithography, etching, high precision alignment (HPA), and chemical mechanical polishing (CMP). In this work, we demonstrate an easy-to-fabricate SiNx grating coupler only requiring a single patterning step without the need of HPA and CMP. A coupling coefficient of -2.5 dB and 1-dB-bandwidth of 65 nm have been experimentally measured.
Dynamically adjustable high-Q quasi-bound state in the continuum based on Si gratings and graphene hybrid system

Zhimin Liu,Yadong Xie,Xin Luo,Fengqi Zhou,Ziqiang Cheng,Zao Yi

DOI: https://doi.org/10.1016/j.optlastec.2024.111106

IF: 4.939

2024-05-11

Optics & Laser Technology

Abstract:Two quasi-bound states in the continuum (BICs) are achieved by breaking the symmetry of grating spacing, grating width, and grating height in the infinitely long periodic Si grating and graphene hybrid system. Firstly, the relationship between three types of asymmetry and the Q factor was determined, and two BICs were classified and discussed. Next, an ambient refractive index sensor is designed utilizing the quasi-BIC; this sensor exhibits an outstanding sensitivity of S = 148.525 THz/RIU, with a maximum figure of merit (FOM) exceeding 19471. Finally, the influence of graphene Fermi energy levels on reflection and transmission spectra is analyzed, and a quasi-BIC is fabricated simply by controlling the Fermi energy levels of graphene without breaking other symmetry parameters. Compared with traditional methods, it provides dynamic regulation capabilities that traditional methods lack by adjusting structural parameters, highlighting its strong potential in practical applications.

optics,physics, applied
High-Q photonic crystal cavities in all-semiconductor photonic-crystal heterostructures

Zoe Bushell,Marian Florescu,Stephen Sweeney

DOI: https://doi.org/10.1103/PhysRevB.95.235303

2017-06-01

Abstract:Photonic crystal cavities enable the realization of high Q-factor and low mode-volume resonators, with typical architectures consisting of a thin suspended periodically-patterned layer to maximize confinement of light by strong index guiding. We investigate a heterostructure-based approach comprising a high refractive index core and lower refractive index cladding layers. Whilst confinement typically decreases with decreasing index contrast between the core and cladding layers, we show that, counter-intuitively, due to the confinement provided by the photonic band structure in the cladding layers, it becomes possible to achieve Q-factors $>10^4$ with only a small refractive index contrast. This opens up new opportunities for implementing high Q-factor cavities in conventional semiconductor heterostructures, with direct applications to the design of electrically-pumped nano-cavity lasers using conventional fabrication approaches.

Applied Physics,Mesoscale and Nanoscale Physics,Other Condensed Matter,Optics
Demonstration of a Thermo-Optic Phase Shifter by Utilizing High-Q Resonance in High-Index-contrast Grating.

Jiaxin Lv,Xuefan Yin,Jicheng Jin,Haiyang Zhang,Che Zhao,Chao Peng,Weiwei Hu

DOI: https://doi.org/10.1364/ol.43.000827

IF: 3.6

2018-01-01

Optics Letters

Abstract:A thermo-optic phase shifter is proposed and demonstrated by utilizing the high-Q resonance in high-index-contrast grating (HCG). The Q-factor up to similar to 12000 is measured in a footprint of 110 mu m x 300 mu m. By heating the HCG with paired metal strip micro-heaters, the optical resonance shifts, which induces phase modulation. A phase shift of similar to 1.2 pi under heating power of similar to 32 mW is directly observed and demodulated from the fringes shifting in a Michelson interferometer. The proposed configuration can also be extended to realize high-speed phase shift by adopting electro-optical modulation. (C) 2018 Optical Society of America
Greater Than One Billion Q Factor for On-Chip Microresonators

Lue Wu,Heming Wang,Qifan Yang,Qing-xin Ji,Boqiang Shen,Chengying Bao,Maodong Gao,Kerry Vahala

DOI: https://doi.org/10.1364/ol.394940

IF: 3.6

2020-01-01

Optics Letters

Abstract:High optical quality (Q) factors are critically important in optical microcavities, where performance in applications spanning nonlinear optics to cavity quantum electrodynamics is determined. Here, a record Q factor of over 1.1 billion is demonstrated for on-chip optical resonators. Using silica whispering-gallery resonators on silicon, Q-factor data is measured over wavelengths spanning the C/L bands (100 nm) and for a range of resonator sizes and mode families. A record low sub-milliwatt parametric oscillation threshold is also measured in 9 GHz free-spectral-range devices. The results show the potential for thermal silica on silicon as a resonator material.
Breaking the Q-S Limitation Between the Fundamental and High Order Modes on Multimode Silicon Photonic Crystal Nanobeam Cavity

Chao Wang,Shuo Chen,Zhe Han,Jinzhi Wang,Zixing Gou,Tongyu Nie,Huiping Tian

DOI: https://doi.org/10.1364/cleo_at.2022.jth3b.40

2022-01-01

Abstract:We theoretically demonstrated breaking the quality factor-sensitivity (Q-S) limitation between the fundamental and higher order modes on a multimode silicon photonic crystal nanobeam cavity. Ultra-strong side-surface localizations benefited high-Q and high-overlap-integration resonances were achieved, simultaneously.
High-Performance, High-Index-Contrast Chalcogenide Glass Photonics on Silicon and Unconventional Non-planar Substrates

Yi Zou,Danning Zhang,Hongtao Lin,Lan Li,Loise Moreel,Jie Zhou,Qingyang Du,Okechukwu Ogbuu,Sylvain Danto,J. David Musgraves,Kathleen Richardson,Kevin D. Dobson,Robert Birkmire,Juejun Hu

DOI: https://doi.org/10.1002/adom.201300489

IF: 9

2014-02-14

Advanced Optical Materials

Abstract:This paper reports a versatile technique for the fabrication of high‐index‐contrast photonic structures on both silicon and plastic substrates. The fabrication technique combines low‐temperature chalcogenide glass film deposition and resist‐free single‐step thermal nanoimprint to process low‐loss, sub‐micron single‐mode waveguides with a smooth surface finish using simple contact photolithography. Using this approach, the first chalcogenide glass microring resonators are fabricated by thermal nanoimprinting. The devices exhibit an ultra‐high quality factor of 4 × 105 near 1550 nm wavelengths, which represents the highest value reported in chalcogenide glass microring resonators. Furthermore, sub‐micrometer nanoimprinting of chalcogenide glass films on non‐planar plastic substrates is demonstrated, which establishes the method as a facile route for the monolithic fabrication of high‐index‐contrast devices on a wide array of unconventional substrates. High‐index‐contrast photonic structures are fabricated on both silicon and unconventional plastic substrates in composition‐engineered chalcogenide glass (ChG) thin films, using a roll‐to‐roll and backend‐compatible nanoimprint technique. Imprinted optical resonators exhibit a record quality factor of 4 × 105 near 1550 nm (wavelengths), the highest value reported in ChG microring resonators.

materials science, multidisciplinary,optics
An Integrated Ultra-High-Q Resonator for Optical Clocks, Synthesizers, Gyroscopes and Spectroscopy

K. Vahala,K. Y. Yang,D. Y. Oh,S. H. Lee,X. Yi,Q. F. Yang

DOI: https://doi.org/10.1109/ipcon.2017.8116153

2017-01-01

Abstract:A microresonator having Q factors greater than 200 million and featuring a silicon-nitride integrated coupling waveguide is described. The device is a critical advance for new microcavity applications requiring integrated, ultra-high-Q and millimeter-scale cavities.
Efficient resonance management in ultrahigh-Q one-dimensional photonic crystal nanocavities fabricated on 300 mm SOI CMOS platform

Weiqiang Xie,Peter Verheyen,Marianna Pantouvaki,Joris Van Campenhout,Dries Van Thourhout

DOI: https://doi.org/10.48550/arXiv.2009.01351

2020-09-03

Abstract:Photonic crystal (PhC) nanocavities have demonstrated unique capabilities in terms of light confinement and manipulation. As such, they are becoming attractive for the design of novel resonance-based photonic integrated circuits (PICs). Here two essential challenges arise however - how to realize ultrahigh-Q PhC cavities using standard fabrication processes compatible with large volume fabrication, and how to efficiently integrate them with other standard building blocks, available in exiting PIC platforms. In this work, we demonstrate ultrahigh-Q 1D PhC nanocavities fabricated on a 300 mm SOI wafer by optical lithography, with a record Q factor of up to 0.84 million. Moreover, we show efficient mode management in those oxide embedded cavities by coupling them with an access waveguide and realize two critical components: notch filters and narrow-band reflectors. In particular, they allow both single-wavelength and multi-wavelength operation, at the desired resonant wavelengths, while suppressing all other wavelengths over a broad wavelength range (>100 nm). Compared to traditional cavities, this offers a fantastic strategy for implementing resonances precisely in PIC designs with more freedom in terms of wavelength selectivity and the control of mode number. Given their compatibility with optical lithography and compact footprint, the realized 1D PhC nanocavities will be of profound significance for designing compact and novel resonance-based photonic components on large scale.

Optics

High-Q Resonance Implementation with Mini-Scale High-Index-Contrast Grating on Silicon-on-Insulator

Fabrication of High-Q Crystalline Microresonators by Femtosecond Laser Direct Writing for Phase Matched Second Harmonic Generation

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Mode Splitting in High-Index-contrast Grating with Mini-Scale Finite Size.

High- Q Photonic Crystal Cavity in a Single-Mode Silicon Ridge Waveguide

Demonstration of High-Q Mid-Infrared Chalcogenide Glass-On-Silicon Resonators

Diffractive Broadband Coupling into High-Q Resonant Cavities

Dry-etched Ultrahigh-Q Silica Microdisk Resonators on a Silicon Chip

Demonstration of High-Performance, Sub-Micron Chalcogenide Glass Photonic Devices by Thermal Nanoimprint

Single-Mode Silicon-On-Insulator Elliptical Microdisk Resonators with High Q Factors

An Ultrahigh-Q Microresonator on 4H-silicon-carbide-on-insulator Platform for Multiple Harmonics, Cascaded Raman Lasing and Kerr Comb Generations

Concentric Silicon Micro-Ring Resonators with Enhanced Transmission Notch Depth

Fabrication-friendly High-Efficiency Silicon Nitride Grating Coupler

Dynamically adjustable high-Q quasi-bound state in the continuum based on Si gratings and graphene hybrid system

High-Q photonic crystal cavities in all-semiconductor photonic-crystal heterostructures

Demonstration of a Thermo-Optic Phase Shifter by Utilizing High-Q Resonance in High-Index-contrast Grating.

Greater Than One Billion Q Factor for On-Chip Microresonators

Breaking the Q-S Limitation Between the Fundamental and High Order Modes on Multimode Silicon Photonic Crystal Nanobeam Cavity

High-Performance, High-Index-Contrast Chalcogenide Glass Photonics on Silicon and Unconventional Non-planar Substrates

An Integrated Ultra-High-Q Resonator for Optical Clocks, Synthesizers, Gyroscopes and Spectroscopy

Efficient resonance management in ultrahigh-Q one-dimensional photonic crystal nanocavities fabricated on 300 mm SOI CMOS platform