One-dimensional and two-dimensional Er 3+ -doped germanate glass waveguides by combination of He + ion implantation and precise diamond blade dicing
Chun-Xiao Liu,Yan Lu,Wei-Jie Ding,Jia-Li You,Liao-Lin Zhang,Li-Li Fu,Qing-Yang Yue,She-Bao Lin,Yan-Jun Zhou
DOI: https://doi.org/10.1016/j.vacuum.2022.111743
IF: 4
2022-12-17
Vacuum
Abstract:Compact and miniaturized Er 3+ -doped waveguide structure is an important research direction in integrated optics. In this work, the Er 3+ -doped germanate glass was bombarded by a 400-keV He + ion beam with a fluence of 6.0 × 10 16 ions/cm 2 for the formation of the one-dimensional waveguide in a vacuum. Subsequently, the precise diamond blade with a rotating velocity of 20,000 rpm and a cutting speed of 0.1 mm/s was applied to dice the surface of the one-dimensional waveguide for the fabrication of the two-dimensional structure. The formation mechanism and the refractive index profile of the one-dimensional waveguide were studied by the SRIM 2013 and the RCM, respectively. The electromagnetic field profiles for the fundamental modes of both one-dimensional and two-dimensional waveguides were measured by the end-face coupling method. It presents some useful information in the field of fabrication and characterization of optical waveguides for active photonic applications.
materials science, multidisciplinary,physics, applied