Abstract:Traditional Kelvin probe force microscopy (KPFM) is mainly limited to the characterization of two-dimensional (2D) surfaces, and in situ surface potential (SP) imaging along 3D device surfaces remains a challenge. This paper presents a multimode 3D-KPFM based on an orthogonal cantilever probe (OCP) that can achieve SP mapping of 3D micronano structures. It integrates three working modes: a bending mode for 2D horizontal surface imaging, a torsion mode for vertical sidewall imaging, and a vector tracking-based 3D scanning mode. The customized OCP has a nanoscale tip protruding from the side and underside of the cantilever, rather than the front, and the extended tip makes the proposed approach universally applicable for 3D detection from the nanometer to micrometer scale. The spatial resolution of the proposed method is analyzed by simulation, which shows it can reduce the cantilever homogenization effect. Linearity and energy resolution measurements show that the proposed method has comparable performance to traditional methods. A comparative experiment using a gold-silicon interface verifies the accuracy of the reported method in its bending and torsion modes. Further, the imaging ability of the 3D scanning mode is confirmed in the 3D characterization of a step grating. This technique is applied to the in situ characterization of a microforce sensor with microcomb structures. The experiment results show that this method can excellently achieve the 3D quantitative characterization of topography and SP, including critical dimensions and SP along a 3D device surface. This novel 3D-KPFM technique has many potential applications in the further exploration of 3D micronano devices.

Measurement of Surface Potential and Adhesion with Kelvin Probe Force Microscopy

Multiparametric Kelvin Probe Force Microscopy for the Simultaneous Mapping of Surface Potential and Nanomechanical Properties.

Kelvin Probe Force Microscopy and Its Application

Integrated Tapping Mode Kelvin Probe Force Microscopy with Photoinduced Force Microscopy for Correlative Chemical and Surface Potential Mapping

Nanoscale Mapping of the Surface Potential: Multifrequency Modulation Open-Loop Kelvin Probe Force Microscopy

Pulsed Force Kelvin Probe Force Microscopy-A New Type of Kelvin Probe Force Microscopy under Ambient Conditions

Surface Potential Modeling and Reconstruction in Kelvin Probe Force Microscopy

Pulsed Force Kelvin Probe Force Microscopy through Integration of Lock-In Detection

Single-Harmonic Response Open-Loop Kelvin-Probe Force Microscopy

Three-Dimensional Kelvin Probe Force Microscopy

High-Bandwidth Multiparametric Kelvin Probe Force Microscopy with Polymer Microcantilevers

Torsional Harmonic Kelvin Probe Force Microscopy for High-Sensitivity Mapping of Surface Potential.

Surface Profile Measurement of Micro-Optics by Using a Long Stroke Atomic Force Microscope

Full data acquisition in Kelvin Probe Force Microscopy: Mapping dynamic electric phenomena in real space

Practical Aspects of Single-Pass Scan Kelvin Probe Force Microscopy.

Spatially Resolved High Voltage Kelvin Probe Force Microcopy: A Novel Avenue for Examining Electrical Phenomena at Nanoscale

Excluding Contact Electrification in Surface Potential Measurement Using Scanning Kelvin Probe Microscopy.

Topography and surface potential in Kelvin force microscopy of perfluoroalkyl alkanes self-assemblies

Direct measurement of surface photovoltage by AC bias Kelvin probe force microscopy

Kelvin Probe Force Microscopy for Contact Potential Difference Measurement of ZnO Film

Intermodulation electrostatic force microscopy for imaging surface photo-voltage