Abstract:Hemispherical resonator gyro is a novel type of high-precision and high reliability inertial grade solid gyro. In addition to have the features of simple structure, reduction in the number of parts, small volume, light-weight, stable performance, strong anti-interference ability, no need of temperature compensation, which makes it widely used in inertial system. The hemispherical resonator is the core component of high-precision hemispherical resonator gyro. The effect factors affecting the precision of hemispherical resonator gyro are roundness, concentricity, roughness, quality factor (Q factor) and frequency splitting after the hemispherical resonator is machined. The processing method and strictly process control determine the precision and Q factor of the hemispherical resonator. The loss of hemispherical resonator is discussed. The mechanical loss factors of hemispherical resonator include surface loss, thermal elastic loss, anchor loss and internal friction loss. The limiting factors of hemispherical resonator Q factor are surface quality, processing stress and geometrical structure. The structure of hemispherical resonator is designed using Corning 7979 fused silica as material. The designed surface roughness should be less than 0.02μm, the roundness and concentricity should be less than 0.3μm. Comprehensively considering theoretical precision and engineering application, we proposed a set of precision machining technology, including precision machining, precision polishing, and chemical etching. Using such technology, the roundness of resonator sphere is 0.17μm, the surface roughness of resonator sphere is 15.2nm, Q factor is 3.11× 107 .

An Improved Fabrication Process for Micro Hemispherical Resonator Gyroscope

A Bulk Micromachined Gyroscope With Improved Quality-Factors At Atmospheric Pressure

Wafer-Level Fabrication Process for Micro Hemispherical Resonators

Structure Design and Structural Parameter Optimization of Fully Symmetric Vibratory Gyroscope

A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope

0.015 Degree-Per-Hour Honeycomb Disk Resonator Gyroscope

Precision Machining Technology of High Quality Factor Hemispherical Resonator

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Micro Hemispherical Resonator Gyroscope with Teeth-Like Tines

Microsacle PolySilicon Hemispherical Shell Resonating Gyroscopes with Integrated Three-dimensional Curved Electrodes

Surface evolution of fused silica hemispherical resonators and its influence on the quality factor

4.11-Million Q-factor Whole-Angle MEMS Hemispherical Resonator Gyroscope with 0.013°/h Bias Instability

0.04 Degree-Per-hour MEMS Disk Resonator Gyroscope with High-Quality Factor (510 K) and Long Decaying Time Constant (74.9 S)

A MEMS Disk Gyroscope with High Fabrication Precision, High Quality Factor (>810k) and High Overload Characteristic (>15000g)

Decreasing Frequency Splits of Hemispherical Resonators by Chemical Etching

Design, Fabrication and Characterization of Disk Resonator Gyroscope with Vibration and Shock Resistance

High Finesse Silica Waveguide Ring Resonators for Resonant Micro-Optic Gyroscopes

Design and optimization of a resonant output frequency gyroscope for robust sensitivity and bandwidth performance

Design, Fabrication, and Characterization of a Multi-curved Surface Fusion Metal Resonant Gyroscope

Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator

Design, Fabrication, and Characterization of a Multicurved Surface Fusion Metal Resonant Gyroscope