Abstract:This treatise studies a microoptoelectromechanical accelerometer (MOEMA) with an optical measuring transducer built according to the optical tunneling principle (evanescent coupling). The work discusses the design of the accelerometer's microelectromechanical sensing element (MSE) and states the requirements for the design to achieve a sensitivity threshold of 1 μg m/s2 at a calculated eigenvalue of the MSE. The studies cover the selection of the dimensions, mass, eigenfrequency and corresponding stiffness of the spring suspension, gravity-induced cross-displacements. The authors propose and experimentally test an optical transducer positioning system represented by a capacitive actuator. This approach allows avoiding the restrictions in the fabrication of the transducer conditioned by the extremely high aspect ratio of deep silicon etching (more than 100). The designed MOEMA is tested on three manufactured prototypes. The experiments show that the sensitivity threshold of the accelerometers is 2 μg. For the dynamic range from minus 0.01 g to plus 0.01 g, the average nonlinearity of the accelerometers' characteristics ranges from 0.7% to 1.62%. For the maximum dynamic range from minus 0.015 g to plus 0.05 g, the nonlinearity ranges from 2.34% to 2.9%, having the maximum deviation at the edges of the regions. The power gain of the three prototypes of accelerometers varies from 12.321 mW/g to 26.472 mW/g. The results provide broad prospects for the application of the proposed solutions in integrated inertial devices.

Micro Acceleration Measurement System Based on Highly-Sensitive Tunnel Magneto-Resistance Sensor

High-precision micro-displacement sensor based on tunnel magneto-resistance effect

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

High Sensitivity Optical MEMS Accelerometer Based on a Metal Fabry–Pérot Microcavities Wavelength Modulation System

A Low 1/f Noise Tunnel Magnetoresistance Accelerometer

High-sensitivity tunneling magneto-resistive micro-gyroscope with immunity to external magnetic interference

Fabrication and Characterization of A Microaccelerometer Based on Resonant-Tunneling Diodes

A magneto-mechanical accelerometer based on magnetic tunnel junctions

A micromachined resonant accelerometer

The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer

Structural Design and Testing of a Micromechanical Resonant Accelerometer

A microchip optomechanical accelerometer

Development and Comprehensive Evaluation of TMR Sensor-Based Magnetrodes

Isolation, purification and characterization of keratinolytic proteinase from Microsporum canis.

Design and Test of a Micromachined Resonant Accelerometer with High Scale Factor and Low Noise

A resonant magnetic microsensor based on magnetic torque with piezoresistive readout

A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost

A New High-Precision Micro-Accelerometer Based on Optomechanical System

Fabrication and Characterization of Monolithic Integrated Three-Axis Acceleration/Pressure/Magnetic Field Sensors

Design of a Hybrid Micro/Nano Cantilever-based Resonant Sensor and its Fabrication Method