Wide-range, Ultra-Compact, and High-Sensitivity Ring Resonator Biochemical Sensor with CMOS-compatible Hybrid Plasmonic Waveguide.

Xiangpeng Ou,Yan Yang,Fujun Sun,Peng Zhang,Bo Tang,Bin Li,Ruonan Liu,Daoquin Liu,Zhihua Li
DOI: https://doi.org/10.1364/oe.428159
IF: 3.8
2021-01-01
Optics Express
Abstract:A ring resonator-based biochemistry sensor with a wide range, ultra-compact footprint, and high sensitivity is proposed, which utilizes a suspended slot hybrid plasmonic (SSHP) waveguide. The waveguide consists of a suspended Si nanowire separated from a Cu metal surface by a nanoscale air gap. The hybridization of fundamental mode of a Si channel waveguide with the surface plasmon polariton (SPP) mode of Cu-Si interface achieves a strong light confinement, high waveguide sensitivity (Sw), and low optical loss, showing a great potential in integrated optical sensor. The sensitivity, the detection limit and the detection range of the SSHP waveguide-based biochemistry sensor with a miniaturized radius of 1 µm are numerically demonstrated as 458.1 nm/RIU, 3.7 × 10-5 RIU and 0.225 RIU, respectively. These superior performances as well as the fully CMOS compatibility enable the integrated optical sensing applications.
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