A Sensitive Bi-Reflection Surface Plasmon Resonance Waveguide Sensor Based On Sion

Wei Zhang,Xiaohai Xiong,Luping Zhu,Mingyu Li,Jianjun He
DOI: https://doi.org/10.1109/ICOCN.2013.6617199
2013-01-01
Abstract:A high-performance bi-reflection surface plasmon resonance waveguide sensor based on SiON was proposed. The thickness of Ag is optimized. The detection limit and the sensitivity are improved at the expense of loss using two planar reflection surfaces. A sensitivity of 103.8degree/RIU or 2.86x10(4)dB/RIU as well as a refractive index variation of 1x10(-5)RIU were measured.
What problem does this paper attempt to address?