Encapsulation structure and encapsulation method for graphene hall element

Xu Huilong,Shi Runbo,Zhang Zhiyong,Peng Lianmao,Wang Sheng
2013-01-01
Abstract:The invention discloses an encapsulation structure and an encapsulation method for a graphene hall element. The structure comprises the graphene hall element, wherein the graphene hall element comprises a graphene layer; the graphene layer comprises a graphene trench and a contact electrode contact end integrated with a port of the graphene trench; contact electrodes are arranged on the upper surface of the contact electrode contact end; an organic thin film layer is arranged on the upper surface of the graphene trench positioned between the contact electrodes; and an inorganic thin film layer is arranged on the organic thin film layer. According to the encapsulation method, the organic thin film layer is prepared on the upper surface of the graphene trench between the contact electrodes of the graphene hall element, and the inorganic thin film layer is prepared on the organic thin film layer. The organic thin film layer has an encapsulation function and serves as an etching stopping layer in a trench graph forming process; and therefore, the technical steps are reduced, and the preparation cost of devices is reduced.
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