Hall element and manufacturing method thereof

Zhiyong Zhang,Huilong Xu,Lianmao Peng,Honggang Liu,Sheng Wang
2011-01-01
Abstract:The invention discloses a Hall element and a manufacturing method thereof. An active area of the Hall element is made of a graphene material; a pair of exciting electrodes is in contact with two ends of a graphene channel so as to provide an electric current source or a voltage source; and a pair of Hall electrodes is in contact with both sides of the graphene channel so as to test Hall voltage. The Hall element has the advantages of high sensitivity, very high linearity and temperature stability, capability of working well in a voltage mode and an electric current mode, simple preparation process and suitability for preparing a Hall integrated circuit.
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