Laser Liftoff Enabled Batch Fabrication of Ultrathin Graphene Hall Devices

Jinpeng Tian,Junqi Huang,Man Wang,Keqing Yu,Hu Guo,Wenchao Luo,Yinghui Dong,Yizhe Wang,Zhixing Zhang,Wenwei Zhang,Cheng Wang,Yuan Jia
DOI: https://doi.org/10.1021/acsami.4c12499
IF: 9.5
2024-11-28
ACS Applied Materials & Interfaces
Abstract:When optimizing the interface between low-dimensional materials and flexible substrates, the surface properties are essential for preserving their exceptional electronic properties. This study presents an approach to fabricating flexible low-dimensional electronic devices using a laser liftoff process that enables optimal interface quality and batch fabrication. Graphene Hall sensors on 6-μm polyimide substrates were batch-fabricated to demonstrate the utility of this approach. The sensors...
materials science, multidisciplinary,nanoscience & nanotechnology
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