Abstract:The advent of aberration-corrected transmission electron microscopy in 1998 [1] has provided materials science with entirely new tools for quantitative investigations. Four key innovations have to be mentioned: (1) The possibility to operate the electron microscope as a variable-sphericalaberration instrument allows to derive a new phase contrast theory optimizing both resolution and point spread [2]. In classical Scherzer phase contrast theory the radius of the point spread disc amounts to three times the Scherzer resolution limit. Besides the fact that information is lost by placing an aperture in the diffraction plane to keep the contrast oscillations in the contrast transfer function from affecting the images this point spread is a second disadvantage of the classical Scherzer approach to phase contrast. Both limitations can be substantially reduced in a new theory in which by both the objective lens defocus Z as well as C S the spherical aberration parameter adopt specific values. As a result the resolution limit coincides with the information limit and the point spread gets reduced to about one half of the latter making it an uncritical parameter in practice. (2) The negative spherical aberration imaging (NCSI) technique leads to enhanced contrast of atoms with low nuclear charge number [3]. It relies on two advantages compared to the classical Zernike technique. The shift of the phase of the diffracted waves is, in contrast to the classical Scherzer technique, in clockwise direction leading to white atom contrast. Furthermore the contrast is enhanced by a dynamic non-linear effect. Oxygen, nitrogen and even boron can be imaged directly even when these atomic species occur in close distance to heavy cations. (3) Essentially point-spread-free atomic images allow to measure occupancies of atomic columns, i.e. local concentrations, with lateral atomic resolution evaluating atomically resolved intensity measurements [4]. This means that high-resolution is not only a structural technique. From now on also local composition maps can be derived which are forming an excellent starting point for ab-initio calculations of interface-, boundary- and defect structures. (4) Measurements of atomic distances can be carried out at an accuracy of a few picometers

Atom-by-atom Chemical Identification from Scanning Transmission Electron Microscopy Images in Presence of Noise and Residual Aberrations.

Element Specific Atom Counting at the Atomic Scale by Combining High Angle Annular Dark Field Scanning Transmission Electron Microscopy and Energy Dispersive X‐ray Spectroscopy

Towards atom counting from first moment STEM images: methodology and possibilities

Element specific atom counting for heterogeneous nanostructures: Combining multiple ADF STEM images for simultaneous thickness and composition determination

Imaging Atomic-Scale Chemistry from Fused Multi-Modal Electron Microscopy

Atomic Structure Imaging Using an Aberration-Corrected Transmission Electron Microscope

Deep Learning of Atomically Resolved Scanning Transmission Electron Microscopy Images: Chemical Identification and Tracking Local Transformations

Precisely detecting atomic position of atomic intensity images

Quantitative chemical mapping at the atomic scale

Image enhancement algorithm for absorption imaging

Atomic Cluster Structure Identification Using Aberration-corrected Scanning Transmission Electron Microscopy

Local Crystallography for Quantitative Analysis of Atomically Resolved Images

Atomic-level Quantitative Analysis of Electronic Functional Materials in Aberration-corrected STEM

Atomic Structure Determination Using the Focal-Series Reconstruction Technique

Interpretability of High-Resolution Transmission Electron Microscopy Images

Atomic Resolution Imaging of Light Elements in a Crystalline Environment using Dynamic Hollow-Cone Illumination Transmission Electron Microscopy

Atomic studies on ferroelectric oxides by aberration corrected transmission electron microscopy

Isotope analysis in the transmission electron microscope

CalAtom: A software for quantitatively analysing atomic columns in a transmission electron microscope image.

A small-dataset-trained deep learning framework for identifying atoms on transmission electron microscopy images

The atomic lensing model: new opportunities for atom-by-atom metrology of heterogeneous nanomaterials