Scanning Electron Thermal Absorbance Microscopy for Light Element Detection and Atomic Number Analysis

Ching-Che Lin,Shih-Ming Wang,Bo-Yi Chen,Cheng-Hung Chi,I-Ling Chang,Chih-Wei Chang
DOI: https://doi.org/10.1021/acs.nanolett.1c04502
IF: 10.8
2022-03-10
Nano Letters
Abstract:Recent developments in nanoscale thermal metrology using electron microscopy have made impressive advancements in measuring either phononic or thermal transport properties of nanoscale samples. However, its potential in material analysis has never been considered. Here we introduce a direct thermal absorbance measurement platform in scanning electron microscope (SEM) and demonstrate that its signal can be utilized for atomic number (Z) analysis at nanoscales. We prove that the measured absorbance of materials is complementary to signals of backscattering electrons but exhibits a much higher collection efficiency and signal-to-noise ratio. Thus, it not only enables successful detections of light elements/compounds under low acceleration voltages of SEM but also allows quantitative Z analyses in agreement with simulations. The direct thermal absorbance measurement platform would become an ideal tool for SEM, especially for thin films, light elements/compounds, or biological samples at nanoscales.The Supporting Information is available free of charge at https://pubs.acs.org/doi/10.1021/acs.nanolett.1c04502.Details of CASINO simulation, device fabrication, measurement calibration, experimental mapping methods, characterizations of spatial resolution (PDF)This article has not yet been cited by other publications.
materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology
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