Abstract:The determination of the chemical content is crucial for the quality control in high-precision device fabrication and advanced process development. For reliable chemical composition characterization, certain interaction volume of the target material is necessary for conventional techniques such as energy-dispersive X-ray spectroscopy (EDX) and electron energy loss spectroscopy (EELS). This remains however a challenge for nanostructures. We hereby propose an alternative technique for measuring chemical composition of nanostructures with limited volume. By measuring the differences in the optical absorption of the nanostructure due to the differences in the chemical composition with the resonance frequency detuning of a nanomechanical resonator as well as the assistance of the analytical optical modelling, we demonstrate the possibility of characterizing the carbon content in the direct-write focused electron beam induced deposition (FEBID) gold nanostructures.

What problem does this paper attempt to address?

The problem that this paper attempts to solve is how to accurately measure the carbon content directly written in plasmonic gold structures at the nanoscale. Traditional chemical composition analysis methods, such as energy - dispersive X - ray spectroscopy (EDX) and electron energy - loss spectroscopy (EELS), require a certain sample volume to interact with the probing electrons or radiation beams, which is a challenge in nanostructures. Therefore, the paper proposes a new technique based on nanomechanical scanning absorption microscopy (NSAM). By measuring the optical absorption changes in nanostructures caused by chemical composition differences, combined with the tuning of the resonance frequency of the nanomechanical resonator and analytical optical modeling, it is used to characterize the carbon content in focused - electron - beam - induced - deposition (FEBID) gold nanostructures directly written. Specifically, the paper mainly focuses on the following points: 1. **Application and Limitations of FEBID Technology**: FEBID is a mask - less and resist - less direct - writing method, suitable for fabricating complex plasmonic nanostructures on any sample. However, the gold nanostructures prepared by FEBID usually contain about 25 - 30 atomic percent of gold, and the rest is mainly residual carbon from the precursor, which limits its application in high - precision device manufacturing. 2. **Post - processing Purification Technologies**: In order to improve the purity of gold nanostructures, the paper explores various post - processing purification methods, such as electron - beam exposure, annealing, laser - assisted FEBID, substrate heating, water vapor and oxygen plasma treatment, etc. In particular, the author finds that using water as an oxidizing gas can significantly improve the purity of gold nanostructures. 3. **Introduction of NSAM Technology**: In order to overcome the limitations of traditional methods at the nanoscale, the paper introduces NSAM technology. NSAM can directly measure the chemical composition of a single plasmonic nanostructure by monitoring the resonance frequency shift of the nanomechanical resonator caused by the photothermal effect of the nanostructure. This method can not only provide high - resolution chemical composition analysis but also be used to evaluate the effects of different purification methods. 4. **Theoretical Model and Experimental Verification**: The paper establishes the relationship between carbon content and optical absorption cross - section through the effective - medium approximation (EMA) and Mie theory, and verifies this model with experimental data. The results show that NSAM technology can effectively characterize the carbon content in FEBID gold nanostructures and is consistent with EDX measurement results. In conclusion, this paper aims to develop a new technical means to overcome the limitations of traditional chemical composition analysis methods at the nanoscale and provide new solutions for the manufacturing and characterization of high - precision nano - devices.

Analysis of carbon content in direct-write plasmonic Au structures by nanomechanical scanning absorption microscopy

Coherent Vibrational Spectroscopy of Electrochemical Interfaces with Plasmonic Nano-gratings.

Plasmonic Imaging of Surface Electrochemical Reactions of Single Gold Nanowires.

High-spatial-resolution composition analysis of micro/nano-structures with a nanoscale compositional variation

Focused Ion Beam Assisted Interface Detection for Fabricating Functional Plasmonic Nanostructures

Electrochemical Impedance Spectroscopy of Single Au Nanorods.

Sub-microanalysis of Solid Samples with Near-Field Enhanced Atomic Emission Spectroscopy

Direct writing of gold nanostructures with an electron beam: On the way to pure nanostructures by combining optimized deposition with oxygen-plasma treatment

Direct Writing Nanostructures on Au Nano-Film by Laser Irradiating Cantilevered Scanning Near-Field Optical Microscope Tip

Recent Progress in Scanning Electron Microscopy for the Characterization of Fine Structural Details of Nano Materials

Direct Imaging of Single Plasmonic Metal Nanoparticles in Capillary with Laser Light-Sheet Scattering Imaging

Atomic-Layer-Deposition Assisted Formation of Wafer-Scale Double-Layer Metal Nanoparticles with Tunable Nanogap for Surface-Enhanced Raman Scattering

Scanning Electron Thermal Absorbance Microscopy for Light Element Detection and Atomic Number Analysis

Submicronic-Scale Mechanochemical Characterization of Oxygen-Enriched Materials

Chemical Measurement and Analysis: from Phenomenon to Essence

In situ STEM analysis of electron beam induced chemical etching of an ultra-thin amorphous carbon foil by oxygen during high resolution scanning

Three-dimensional Elemental Mapping of Hollow Fe2O3@SiO2 Mesoporous Spheres Using Scanning Confocal Electron Microscopy

Direct observation of single plasmonic metal nanoparticle reaction in microcolumn with chromatic-aberration-free LASER light-sheet scattering imaging.

Modeling and analysis of discrete particle detection in wide-field surface plasmon resonance microscopy

Three-Dimensional Analysis of Nanoparticles on Carbon Support Using Aberration-Corrected Scanning Confocal Electron Microscopy

Digitizing Gold Nanoparticle-Based Colorimetric Assay By Imaging And Counting Single Nanoparticles