Abstract:The advent of aberration-corrected transmission electron microscopy in 1998 [1] has provided materials science with entirely new tools for quantitative investigations. Four key innovations have to be mentioned: (1) The possibility to operate the electron microscope as a variable-sphericalaberration instrument allows to derive a new phase contrast theory optimizing both resolution and point spread [2]. In classical Scherzer phase contrast theory the radius of the point spread disc amounts to three times the Scherzer resolution limit. Besides the fact that information is lost by placing an aperture in the diffraction plane to keep the contrast oscillations in the contrast transfer function from affecting the images this point spread is a second disadvantage of the classical Scherzer approach to phase contrast. Both limitations can be substantially reduced in a new theory in which by both the objective lens defocus Z as well as C S the spherical aberration parameter adopt specific values. As a result the resolution limit coincides with the information limit and the point spread gets reduced to about one half of the latter making it an uncritical parameter in practice. (2) The negative spherical aberration imaging (NCSI) technique leads to enhanced contrast of atoms with low nuclear charge number [3]. It relies on two advantages compared to the classical Zernike technique. The shift of the phase of the diffracted waves is, in contrast to the classical Scherzer technique, in clockwise direction leading to white atom contrast. Furthermore the contrast is enhanced by a dynamic non-linear effect. Oxygen, nitrogen and even boron can be imaged directly even when these atomic species occur in close distance to heavy cations. (3) Essentially point-spread-free atomic images allow to measure occupancies of atomic columns, i.e. local concentrations, with lateral atomic resolution evaluating atomically resolved intensity measurements [4]. This means that high-resolution is not only a structural technique. From now on also local composition maps can be derived which are forming an excellent starting point for ab-initio calculations of interface-, boundary- and defect structures. (4) Measurements of atomic distances can be carried out at an accuracy of a few picometers

Quantitative chemical mapping at the atomic scale

Element Specific Atom Counting at the Atomic Scale by Combining High Angle Annular Dark Field Scanning Transmission Electron Microscopy and Energy Dispersive X‐ray Spectroscopy

Local Crystallography for Quantitative Analysis of Atomically Resolved Images

Atomic-level Quantitative Analysis of Electronic Functional Materials in Aberration-corrected STEM

Atomic studies on ferroelectric oxides by aberration corrected transmission electron microscopy

Chemical element mapping by x-ray ghost fluorescence

Imaging Atomic-Scale Chemistry from Fused Multi-Modal Electron Microscopy

Experimental Measurements and Theoretical Calculations of the Atomic Structure of Materials with Subangstrom Resolution and Picometer Precision

Imaging 3D Chemistry at 1 nm Resolution with Fused Multi-Modal Electron Tomography

Contrast Reversal in Atomic-Resolution Chemical Mapping

Microwave Atomic Force Microscopy: Quantitative Measurement and Characterization of Electrical Properties on the Nanometer Scale

Seeing Inside Materials by Aberration-Corrected Electron Microscopy

Vibrational Spectroscopy at Atomic Resolution with Electron Impact Scattering

Imaging, Core-Loss, and Low-Loss Electron-Energy-Loss Spectroscopy Mapping in Aberration-Corrected STEM

Aberration corrected STEM and EELS: Atomic scale chemical mapping

B23-O-04Probing the Atomic and Electronic Structure in Materials Through Aberration-Corrected Scanning Transmission Electron Microscopy

Progress in Atomic-Resolution Aberration Corrected Conventional Transmission Electron Microscopy (CTEM)

Local Crystallography Analysis for Atomically Resolved Scanning Tunneling Microscopy Images

Measurement Error in Atomic-Scale STEM-EDS Mapping of a Model Oxide Interface

Precisely detecting atomic position of atomic intensity images

Progress in Aberration-Corrected High-Resolution Transmission Electron Microscopy of Crystalline Solids