Abstract:All-inorganic solid-state batteries (AISSBs) attract great research interest due to the benefits in safety and energy density. The thinfilm battery, based on vacuum technology, is a type of AISSB that could reduce the thickness of a solid-state electrolyte to a few microns and provide void-free electrode-electrolyte contact. The key step of fabricating the thin-film battery is the deposition technique. Conventional pulsed laser deposition (PLD), which uses an excimer laser as energy source, is considered a promising technique but suffers from drawbacks like high cost, low speed, small scale, and consumption of rare/toxic working gases. Here, we introduce a high-repetition 1064 nm Nd:YAG fiber laser to replace the excimer laser for PLD application. This type of laser is solidstate and small in size, and its kHz to MHz repetition rate enables high deposition speed. This work focuses on the deposition of the LiCoO2 electrode, as a demonstration of this novel PLD. The growth rate reached 1 nm/s in an area of similar to 15 cm2. Controlling parameters such as vacuum level and substrate temperature (limited to 550 degrees C in this work) were explored. It was found that high-quality LiCoO2 thin film prefers rough vacuum and high temperature. The electrochemical performances of the electrodes were evaluated in half-cells. The specific capacity is dependent on film thickness and charge/discharge rate: a value of 90 mAh/g was achieved for a 1.31 mu m sample at 0.2 C, while 118 mAh/g was reached for a 0.27 mu m sample at 0.5 C. The long-term cycling performance of a 0.43 mu m sample showed 80% capacity retention after 565 charge-discharge cycles at 0.5 C. These preliminary results demonstrate that the Nd:YAG fiber-laser-based PLD can be a promising method for producing thin-film electrodes in large scale.

Electrochemical Properties of LiCoO2 Thin Film Electrode Prepared by Ink-Jet Printing Technique

Thin film LiCoO2 cathode prepared by using ink-jet printing technique and its electrochemical properties

High-performance thin-film Li<sub>4</sub>Ti<sub>5</sub>O<sub>12</sub> electrodes fabricated by using ink-jet printing technique and their electrochemical properties

High-performance thin-film Li 4 Ti 5 O 12 electrodes fabricated by using ink-jet printing technique and their electrochemical properties

Mixed Lithium Ion and Electron Conducting LiAlPO 3.93 F 1.07 -Coated LiCoO 2 Cathode with Improved Electrochemical Performance

A novel and facile route of ink-jet printing to thin film SnO2 anode for rechargeable lithium ion batteries

Electrochemical Performance of Nano-Sio2 Modified LiCoO2 Thin Films Fabricated by Electrostatic Spray Deposition (ESD)

High-voltage Performance of LiCoO2 Cathode Studied by Single Particle Microelectrodes –influence of Surface Modification with TiO2

Synthesis and Characterization of Ultrafine LiCoO2 Powders by a Spray-Drying Method

Enhanced Interfacial Kinetics and High Rate Performance of LiCoO2 Thin-Film Electrodes by Al Doping and in Situ Al2O3 Coating.

ELECTROCHEMICAL PROPERTIES OF LiCoO_2 THIN FILM CATHODE SPUTTERED BY PULSED LASER DEPOSITION

Licoo2 Thin Film Cathode Fabricated by Pulsed Laser Deposition

LiCoPO4-based ternary composite thin-film electrode for lithium secondary battery

Synthesis and Electrochemical Performances of LiCoO 2 Recycled from the Incisors Bound of Li-ion Batteries

Facile Synthesis of LiCoO2 Nanowires with High Electrochemical Performance

A nanocrystalline Co3O4 thin film electrode for Li-ion batteries

High Performances of Ultrafine and Layered LiCoO2 Powders for Lithium Batteries by a Novel Sol–gel Process

High-Speed and One-Step Deposition of a LiCoO2 Thin-Film Electrode by a High-Repetition 1064 nm Nd:YAG Fiber Laser

High-Speed and One-Step Deposition of a LiCoO 2 Thin-Film Electrode by a High-Repetition 1064 nm Nd:YAG Fiber Laser

Improved Electrochemical Performance of Licoo2 Electrodes with Zno Coating by Radio Frequency Magnetron Sputtering

All-Solid-State Thin Film Lithium Batteries With Licoo2 Cathodes