Abstract:The advent of aberration-corrected transmission electron microscopy in 1998 [1] has provided materials science with entirely new tools for quantitative investigations. Four key innovations have to be mentioned: (1) The possibility to operate the electron microscope as a variable-sphericalaberration instrument allows to derive a new phase contrast theory optimizing both resolution and point spread [2]. In classical Scherzer phase contrast theory the radius of the point spread disc amounts to three times the Scherzer resolution limit. Besides the fact that information is lost by placing an aperture in the diffraction plane to keep the contrast oscillations in the contrast transfer function from affecting the images this point spread is a second disadvantage of the classical Scherzer approach to phase contrast. Both limitations can be substantially reduced in a new theory in which by both the objective lens defocus Z as well as C S the spherical aberration parameter adopt specific values. As a result the resolution limit coincides with the information limit and the point spread gets reduced to about one half of the latter making it an uncritical parameter in practice. (2) The negative spherical aberration imaging (NCSI) technique leads to enhanced contrast of atoms with low nuclear charge number [3]. It relies on two advantages compared to the classical Zernike technique. The shift of the phase of the diffracted waves is, in contrast to the classical Scherzer technique, in clockwise direction leading to white atom contrast. Furthermore the contrast is enhanced by a dynamic non-linear effect. Oxygen, nitrogen and even boron can be imaged directly even when these atomic species occur in close distance to heavy cations. (3) Essentially point-spread-free atomic images allow to measure occupancies of atomic columns, i.e. local concentrations, with lateral atomic resolution evaluating atomically resolved intensity measurements [4]. This means that high-resolution is not only a structural technique. From now on also local composition maps can be derived which are forming an excellent starting point for ab-initio calculations of interface-, boundary- and defect structures. (4) Measurements of atomic distances can be carried out at an accuracy of a few picometers

High Order Phase Contrast and Source Divergence in Low Energy Electron Microscopy

High-contrast Wide-Field Evanescent Wave Illuminated Subdiffraction Imaging.

Fluorescence emission difference with defocused surface plasmon-coupled emission microscopy.

High Contrast Wide-Field Evanescent Wave Illuminated Sub-Diffraction Imaging (conference Presentation)

Design and commissioning of an aberration-corrected ultrafast spin-polarized low energy electron microscope with multiple electron sources

High-Resolution Imaging with an Aberration-Corrected Transmission Electron Micrscope

Dynamical Diffraction of High-Energy Electrons Investigated by Focal Series Momentum-Resolved Scanning Transmission Electron Microscopy at Atomic Resolution.

A new aberration-corrected, energy-filtered LEEM/PEEM instrument. I. Principles and design

Phase imaging in scanning transmission electron microscopy using bright-field balanced divergency method

Atomic studies on ferroelectric oxides by aberration corrected transmission electron microscopy

Amplitude Contrast Imaging in High-Resolution Transmission Electron Microscopy of Ferroelectric Superlattice Film

Contrast in Atomically Resolved EF-SCEM Imaging

Interpretable and efficient contrast in scanning transmission electron microscopy with a diffraction grating beamsplitter

Aberration Corrected Spin Polarized Low Energy Electron Microscope.

Optical Sectioning and Confocal Imaging and Analysis in the Transmission Electron Microscope

High-order diffraction for optical superfocusing

Direct Estimation and Correction of Residual Aberrations in the Reconstructed Exit-Wavefunction of a Crystalline Specimen

Investigation of Non-Linear Imaging in High-Resolution Transmission Electron Microscopy.

Divergence Angle Consideration in Energy Spread Measurement for High-Quality Relativistic Electron Beam in Laser Wakefield Acceleration

Applications of Aberration-Corrected Low-Energy Electron Microscopy for Metal Surfaces

Emittance Minimization for Aberration Correction I: Aberration correction of an electron microscope without knowing the aberration coefficients