Heterogeneous Integration of 42°YX LiNbO3/SiO2/Quartz for Wideband and Spurious-Free SAW Resonators
Xinjian Ke,Jinbo Wu,Yang Chen,Shibin Zhang,Xiaomeng Zhao,Pengcheng Zheng,Min Zhou,Kai Huang,Xin Ou
DOI: https://doi.org/10.1109/ted.2024.3450438
IF: 3.1
2024-09-28
IEEE Transactions on Electron Devices
Abstract:As a promising material, lithium niobate (LiNbO3, LN) thin films on heterogeneous substrates have received widespread attention in the field of radio frequency (RF) for broadband filters in recent years. This article proposes a wafer-scale 42°YX LN/SiO2/36°YX quartz (LNOQ) substrate for spurious-free shear horizontal surface acoustic wave (SH-SAW) resonators. Through 3-D finite element simulation, the structures of the LNOQ and interdigital electrodes are optimized to get a large electromechanical coupling coefficient ( ) and good confinement of the acoustic energy, as well as to suppress the spurious modes. The LNOQ wafer fabricated by the ion-slicing process exhibits a high film uniformity of 608.16 nm %. The full-width at half-maximum (FWHM) of the high-resolution X-ray diffraction rocking curve of the LN is only 39.6 arcsec, which has the characteristics of a single crystal. The prepared SAW resonator features a large of 31.56%, high quality factor of 1048, and a clear response over a wide frequency range. The demonstrated LNOQ platform shows great potential in broadband RF wireless communications.
engineering, electrical & electronic,physics, applied