Study of ordered and controllable Ag nanoarrays onphotoluminescence enhancement from a-SiNx∶O film

Qifeng Xu,Xinxin Zhang,Zhongyuan Ma,Yangqing Wu,Zewen Lin,Ling Xu,Wei Li,Kunji Chen,Xinfan Huang,Jun Xu,Duan Feng

DOI: https://doi.org/10.13232/j.cnki.jnju.2017.03.001

2017-01-01

Abstract:Three different sizes of Ag nanoarrays were fabricated by combining nano-polystyrene(PS)self-assembling method and laser annealing technology.The purpose of this work is to investigate the effect of different sizes of Ag nanoarrays on the photoluminescence(PL)from amorphous oxidized Silicon nitride(a-SiNx∶O)films.Firstly,three different sizes of polystyrene(PS)nanometer sphere were paved on the p type Silicon substrate in this experiment,which was used as the patterned substrate subsequently.Secondly,the magnetron sputtering system was adopted to evaporate Ag films on the patterned substrate,which was following treated by laser radiation.Finally,the plasma enhanced chemical vapor deposition(PECVD)system was employed to grow the amorphous oxidized Silicon nitride films on the Ag nanoarrays which had been prepared before.The result of the experiment indicates that compared with the reference a-SiNx∶O film,the PL intensity from the a-SiNx∶O films by introduction of 170 nm,220 nm and 300 nm Ag nanoarrays are improved by 4.6,3.1 and 1.3 times,respectively.The atomic force microscope(AFM)was used to characterize morphology feature of the Ag nanoarrays and the AFM figures show that the Ag nanoarrays are distributed periodically and their sizes can be well controlled.The PL spectra show that the PL peak of a-SiNx∶O film appears red shift phenomenon with the increasement of the size of Ag nanoarrays.Spectrophotometer UV-3600 was used to measure the extinction spectra of the samples.For further researching the effect of different sizes of Ag nanoarrays on the photoluminescence improvement from a-SiNx∶O film,the extinction spectra and the photoluminescence spectra were taken into detailed calculation and analysis.The result of the experiment comfirms that the improvement of photoluminescence from a-SiNx∶O films is attributed to the coupling between Ag localized surface plasma(LSP)and the light emission from a-SiNx∶O films.