Silicon Diffusion Coating on Steel by Chemical Vapor Deposition of SiH4

DU Ping-fan,WO Yin-hua,YAO Kui-hong,WANG Yong,LI Ye
DOI: https://doi.org/10.3969/j.issn.1673-3851.2005.03.011
2005-01-01
Abstract:Si diffusion coating is formed on steel substrate surface by chemical vapor deposition of SiH_4. The XRD pattern reveals that the main composition of Si diffusion coating is silicide FeSi. SEM is applied for charactering the surface morphology. The result indicates that the grains attached to each other strongly. The interface of the layer-substrate is shown by metallographic image.
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