Preparation of Ba0.85 Ca0.15 Ti0.9 Zr0.1 O3 Thin Films by PLD and Its Property

ZHANG Tiantian,CUI Ruirui,ZHANG Chi,DENG Chaoyong

DOI: https://doi.org/10.15958/j.cnki.gdxbzrb.2016.01.06

2016-01-01

Abstract:Ba0.85Ca0.15Ti0.9Zr0.1O3(BCTZ)ceramics were prepared by the conventional high temperature solid-state reaction method. BCTZ films were deposited on a SrTiO3(STO)(100) substrate with thin SrRuO3(SRO)e-lectrode( BCTZ/SRO/STO) by pulsed laser deposition ( PLD) . By exploring the growth technology, BCTZ films of high preferred orientation and high crystallinity were prepared at 780℃,O2 pressure of 13 Pa, target-substrate distance of 48 mm and laser frequency of 2 Hz and energy of 200 mJ. A series of BCTZ films of different thickness were obtained under such conditions. The microstructure, thickness and ferroelectric properties of films were characterized by X-ray diffraction ( XRD) , atomic force microscope ( AFM) , the step profiler and ferroelectric tester. Results show that the roughness of films increases as the thickness increases,There are strong correlations between the ferroelectric properties of films and the thickness.The remnant polarization increases as the thickness increases. The coercive field decreases as the thickness increases.