Abstract:The studies on the thermal deposition of transition metal coordination compounds have been directly motivated by the development of organometallic chemical vapor deposition (OMCVD) technique. Among these compounds Cu(II) acetylacetonate, Cu(acac)2, is a potentially important precursor for the deposition of Cu film and preparation of high T(c) superconducting films. However, little information about the kinetics of thermal decomposition of this compound is available. In this paper we report a kinetic study on the deposition of copper film by decomposing Cu(acac)2. A CW CO2 laser is used to heat a quartz substrate and to induce thermal decomposition on the surface. The deposition rate is measured in situ by monitoring the transmittance of the Cu film on the substrate with a He-Ne laser. As the CO2 laser beam only heats the quartz window, the temperature of the reaction cell can be controlled. The dependence of the deposition rate on the laser intensity is determined at a given vapor pressure of Cu(acac)2 and a laser intensity threshold has been observed. Above the threshold the deposition rate increases linearly with laser intensity in the low intensity region. The laser-induced temperature rise of the substrate and the deposition rate constant have been calculated. The Arrhenius plot is linear and the activation energy for thermal deposition of Cu(acac)2 is 181 +/- 19 kJ. mol-1. In higher laser intensity region the deposition rate becomes independent on the laser intensity, but is a function of the vapor pressure of Cu(acac)2. The decomposition of Cu(acac)2 has been found to be first order. The rate-controlling stop seems to be the surface reaction on the substrate at low laser intensity, while the transport of precursor molecules is crucial at high laser intensity.

Study on Thermal Decomposition Kinetics of Copper Acetate Dihydrate with Popescu Method

Study on Thermal Decomposition Kinetics of the Potassium Oxalate Monohydrate

Study on thermal decomposition of copper(II) acetate monohydrate in air

Non-isothermal Decomposition Reaction Kinetics of the Magnesium Oxalate Dihydrate

Copper chloride catalyzed decomposition kinetics of glucose in high temperature liquid water

Non-isothermal Thermal Decomposition Kinetics of High Iron Gibbsite Ore Based on Popescu Method

Study on the non-isothermal decomposition kinetics of AlOOH coated calcium carbonate

Determination of Mechanism Function and Kinetic Parameters of Thermal Decomposition of the 2,2'-Dipyridine-tris(p-methoxybenzoate) Europium(Ⅲ) with Non-isothermal TG and DTG Curves

Thermal Decomposition Kinetics Of Ammonium Aluminum Carbonate Hydroxide

Studies on Thermal Decomposition Process and the Non-Isothermal Decomposition Kinetics for Analginum

KINETICS ON THE THERMAL DEPOSITION OF COPPER(II) ACETYLACETONATE

Thermal analysis and decomposition kinetics of the dehydration of copper sulfate pentahydrate

Kinetic Study of Lithium Perchlorate Decomposition Mechanism

Investigation of the Thermal Decomposition Kinetics of Chalcopyrite Ore Concentrate usıng Thermogravimetric Data

Thermal Stability, Thermal Decomposition and Mechanism Analysis of Cycloaliphatic Epoxy/4,4′-Dihydroxydiphenylsulfone/aluminum Complexes Latent Resin Systems

Studies On The Thermal Decomposition Non-Isothermal Kinetics Of Binuclear Europium Benzoate Ternary Complex With 1,10-Phenanthroline

KINETIC STUDY OF PINE SAWDUST PYROLYSIS VIA TG/DTG ANALYSIS

Mechanism and Kinetics of Thermal Decomposition of Bischofite

The Nonisothermal Decomposition Kinetics of Copper(ii) Complexes with Phthalanilic Acids and Amino Acids

Decomposition Kinetics Research of 12-Bromodehydroabietate Methyl Ester by Non-isothermal Thermogravimetry

Pyrolysis Kinetics, Thermodynamics, and Interaction Analysis of Co-Pyrolysis of Bituminous Coal and Electrolytic Aluminum Solid Waste