Abstract:The studies on the thermal deposition of transition metal coordination compounds have been directly motivated by the development of organometallic chemical vapor deposition (OMCVD) technique. Among these compounds Cu(II) acetylacetonate, Cu(acac)2, is a potentially important precursor for the deposition of Cu film and preparation of high T(c) superconducting films. However, little information about the kinetics of thermal decomposition of this compound is available. In this paper we report a kinetic study on the deposition of copper film by decomposing Cu(acac)2. A CW CO2 laser is used to heat a quartz substrate and to induce thermal decomposition on the surface. The deposition rate is measured in situ by monitoring the transmittance of the Cu film on the substrate with a He-Ne laser. As the CO2 laser beam only heats the quartz window, the temperature of the reaction cell can be controlled. The dependence of the deposition rate on the laser intensity is determined at a given vapor pressure of Cu(acac)2 and a laser intensity threshold has been observed. Above the threshold the deposition rate increases linearly with laser intensity in the low intensity region. The laser-induced temperature rise of the substrate and the deposition rate constant have been calculated. The Arrhenius plot is linear and the activation energy for thermal deposition of Cu(acac)2 is 181 +/- 19 kJ. mol-1. In higher laser intensity region the deposition rate becomes independent on the laser intensity, but is a function of the vapor pressure of Cu(acac)2. The decomposition of Cu(acac)2 has been found to be first order. The rate-controlling stop seems to be the surface reaction on the substrate at low laser intensity, while the transport of precursor molecules is crucial at high laser intensity.

STUDIES ON THE SOLID-STATE REACTIONS OF COORDINATION-COMPOUNDS .58. THE SOLID-SOLID STATE REACTION OF 2,2'-(P-PHENYLENEDIMETHYLENETHIO)DIACETIC ACID WITH COPPER-ACETATE MONOHYDRATE AT LOW HEATING TEMPERATURE

Studies on Solid-State Reactions of Coordination-Compounds .71. Solid-State Reactions of O-Aminobenzoic Acid with Copper (ii) Acetate and Formate at Room-Temperature

The 3D Supramolecular Architecture of Copper(ii) 6-Methyl-2-pyridone-4-carboxylate: Synthesis, Structure, Magnetic Behavior and DFT Studies

SOLID-STATE REACTIONS OF COORDINATION-COMPOUNDS .39. THE SOLID-STATE REACTIONS BETWEEN K2[NI(CN)4].H2O AND SOME ORGANIC-ACIDS AT ROOM-TEMPERATURE

Kinetics and Mechanism of the Acid Dissociation of Copper(ii) Complex of 1,10-Phenanthroline Tetradentate Diamine Ligands

Stability studies on 12-(5′-8′- hydroxyquinolinic)methylene-1,4,7,10-tetraazacyclo tridecane-11,13-dione, 5-substituted 1,10-phenanthroline-copper(II) with Cu2+ or Co2+ binuclear mixed-coordinated systems

Syntheses and Characterization of Copper(ii) Complexes of Bis(acetylacetone)trimethylenediimine

STUDIES ON THE SOLID-STATE REACTIONS OF COORDINATION-COMPOUNDS .40. SOLID-STATE REACTIONS BETWEEN SODIUM-NITROPRUSSIDE AND MN(II), CO(II), NI(II), CU(II) CHLORIDE

Studies on stabilities of 6-(5′-8′-hydroxyquinolinic)methylene-1,4,8,11-tetraazacyclo tetradecane-5,7-dione, 5-substituted 1,10-phenanthroline-copper(II) with Cu2+ or Co2+ binuclear mixed-coordinated systems

Kinetic and Equilibrium Studies of the Acid Dissociation of the Cobalt(Ii) Complexes of N,N '-Dialkyl-1,10-phenanthroline-2,9-dimathanamine Ligands

Solid State Reactions of Coordination Compounds at Low Heating Temperatures

Surface Co-Ordination Reactions of Β-Dicarbonyl Compounds with Metallic Copper

The Solid State Reactions of O‐aminobenzoic Acid with Zn(II), Cu(II), Ni(II), Mn(II) Acetate Hydrate at Room Temperature

Copper-Mediated CRP of Methyl Acrylate in the Presence of Metallic Copper: Effect of Ligand Structure on Reaction Kinetics

Studies on the Dissociation Reactions of 8- Hydroxy - 5 - quinolyl Substituted Macrocyclic Complexes Catalysed by Acid

A Three-Dimensional Framework of Dimeric Copper(ii) Acetate Linked by Coordinated Sodium Cations

FTIR-RAS Studies of the Coordination of Surface Oxide Layers of Copper with Poly(acrylonitrile)

Studies On Solid-Solid Reactions Between 4-Methylbenzenamine And Cucl2 Center Dot 2h(2)O, Cocl2 Center Dot 6h(2)O, And Nicl2 Center Dot 6h(2)O

KINETICS ON THE THERMAL DEPOSITION OF COPPER(II) ACETYLACETONATE

Studies on Solid–Solid Reactions Between 4-Methylbenzenamine and CuCl2·2H2O, CoCl2·6H2O, and NiCl2·6H2O

Study on Thermal Decomposition Kinetics of Copper Acetate Dihydrate with Popescu Method