Development of laser lift-off technology used in the field of flexible electronics

Yu HUANG,Xu LIANG,Nengwei ZHU,Ning PAN,Ying LIN,Xiaodong FANG
DOI: https://doi.org/10.7510/jgjs.issn.1001-3806.2018.04.002
2018-01-01
Abstract:Flexible electronic is an important research direction for the development of wearable equipment,internet of things and other applications.Laser lift-off technique is a technology to separate glass substrates from flexible substrates,and one of the important technologies to realize flexible electronic devices at present with advantages of optional light wavelength,short action time,and small heat effect areas.In this paper,the main technical characteristics of laser lift-off were introduced,its application in different flexible electronic fields was analyzed,the main processes and functions in the application process were discussed.Finally,the future development trend of laser lift-off technology was summarized.The rapid development of laser lift-off technologywill form a strong support for the research and development of flexible electronics industry.
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