Preparation of Zirconium Silicate Film by Non-Hydrolytic Sol-Gel Method and Its Alkali Corrosion Resistance

Guang-fan TAN,Qing HU,Wei-hui JIANG,Jian-min LIU,Guo FENG,Ting CHEN,Cong LI

DOI: https://doi.org/10.16553/j.cnki.issn1000-985x.2017.12.016

2017-01-01

Abstract:Zirconium silicate ( ZrSiO4 ) film was prepared via non-hydrolytic sol-gel method ( NHSG ) combining dip coating process using Zirconium propoxide as zirconium source and tetraethyl orthosilicate as silicon source .The effects of precursor concentration and lifting rate on the morphology , microstructure and alkali corrosion resistance of ZrSiO 4 film were investigated by X-ray diffraction ( XRD ) , Fourier transform infrared spectrometer ( FTIR ) , Scanning electron microscopy ( SEM ) and Atomic force microscope ( AFM ) , respectively .The results show that the smooth and dense ZrSiO 4 film without cracking could be coated on the monocrystalline silicon when the precursor concentration is 0 .1 mol/L and the lifting rate is 1 mm/s.Monocrystalline silicon coated ZrSiO 4 film was soaked in 40％ NaOH solution for 42 h at 40 ℃, only a relatively small pit corrosion on the surface was found , the mass varies a little with the corrosion time and the mass loss was only 0 .17％, which indicate that the ZrSiO 4 film had good alkali corrosion resistance .