Design and simulation of bulk micromachined gyroscope

Ming-xue HUO,Wei-ping CHEN,Yi-jiang CAO,Qiang CHEN,Xiao-wei LIU,Dan ZHANG
DOI: https://doi.org/10.3321/j.issn:0367-6234.2005.09.011
2005-01-01
Abstract:A kind of bulk micromachined gyroscope with novel structure and high sensitivity was simulated and designed. The differential drive eliminated the effect of asymmetric-electrostatic force distribution on the sensitivity. The structure dimensions of the gyroscope were optimized using finite element method (FEM). The analysis results obtained from simulation were that the driving mode frequency was 5. 200 kHz, the detecting mode frequency was 5. 187 kHz and the match coefficient R was approximatively 0. 25%. The mechanical coupling between the drive and detection modes of the gyroscope was eliminated, and the frequency mismatch was reduced by the structure.
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