Effects of annealing on Ti-implantation LiNbO3 optical waveguide

Da-li LIU,Gong-yu LI,Xiao-dong HE,Ping LU
DOI: https://doi.org/10.3969/j.issn.1671-5896.2000.02.002
2000-01-01
Abstract:Low loss LiNbO3 optical waveguide fabricated by ion implantation technology on high quality LiNbO3 crystal is reported, and its scattering spectrum is measured and analyzed. A feasible way is provided for solving transverse diffusion of optical waveguide.
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