Study on an Two Phase-shifting ProfiIometry with an Arbitrary Steps AIgorithm

Jian-liang XU,Ming-an ZHOU,Xiao-fen FANG
DOI: https://doi.org/10.3969/j.issn.1000-1158.2016.05.04
2016-01-01
Abstract:The traditional PSP was researched. Based on a Gram-Schmidt( GS)orthonormalization approach,an two PSP with an arbitrary steps algorithm is proposed. The phase-shift value has not to be known and can taken any value inside the range. Compared with the existing methods,the method can only have two distorted grating image,and thire phase shift accuracy is not required. Experimental results show that compared with the existing methods, the structure is less demanding for the accuracy of the system,and the proposed method is faster,higher accuracy and more effectively.
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