Study on Undecided Steps Technique of the lmproved Measurement System for Phase-shifting Profilometry

Ming-an ZHOU,Jian-liang XU,Xiao-fen FANG
DOI: https://doi.org/10.3969/j.issn.1000-1158.2016.02.04
2016-01-01
Abstract:Phase-shifting profilometry of the improved measurement system is proposed. The proposed system makes the three constraints of the traditional phase-shifting profilometry measurement system less stringent,and reduces requirements of the structure for the system. Compared with traditional phase profile measurement technology,phase-shifting does not need to be equal,and the method can only two distorted grating images which reconstruct 3-D shape. Through theoretical analysis,the mathematical relationship between the phase and the height is given. Experiments show that on the premise of the measurement accuracy can be satisfied,the structure is less demanding for the accuracy of the system,and the improved measurement system is faster and more practical.
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