Progress on research and technology of localized electrochemical deposition

Chen XU,Derong LIU,Lei LIU,Wenbin HU,Zhong WU
DOI: https://doi.org/10.3969/j.issn.1001-9731.2016.10.007
2016-01-01
Abstract:Fabrication techniques for three-dimensional microstructures and nanostructures are limited by their high cost and low efficiency besides their dependence on environmental control,while the development of local-ized electrochemical deposition to a certain degree solved these problems.In this paper,process simulation and development and parameters optimization are discussed through the introduction of the concept and theory,the process control and the research status.In the end,the research emphasis and future trend are prospected ac-cording to the previous work.
What problem does this paper attempt to address?