Preparation and Characterization of SnO2 Thin Film by MOD Method

林殷茵,汤庭鳌,姚熹
DOI: https://doi.org/10.3321/j.issn:1001-9731.2001.03.021
2001-01-01
Abstract:SnO2 thin film was prepared from inorganic materials by using novel MOD method. The precursor and thin film were investigated by FTIR spectra analysis, thermal analysis and ultraviolet-visible light spectra analysis. It is indicated that organic compound of tin is formed during the preparation of the precursor, this is very important for preparing thin film with good optical properties. It is also shown that the thin film undergoes solvent volatilization, organic material burning and crystallization during the heat treatment. It is found that the porosity of the thin film decreased with the increasing of the annealing temperature and the structure of it is dense.
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