Preparation and Study of Transmittance Gas Sensitive SnO2 Thin Film

边志华,郭竹远,刘瑞丽,吴东
DOI: https://doi.org/10.3969/j.issn.1007-9432.2004.06.015
2004-01-01
Abstract:We prepared the suspension of SnO_2 by the sol-gel process,then it was prepared into thin film by spin-coat process. At the room temperature, in the atmosphere containing CO, light transmittance through the film becomes bigger, showing that by the higher sensitivity to CO. The experimental circumstances, the preparing mechanism, and the structure and characteristics of the thin film in the process are studied.
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