Preparation of Tin-Based Oxides Thin Films and Its' Electrochemical Properties

Qi‐Zong Qin
2006-01-01
Abstract:A dense tin-based oxide (SnOx) thin film with smooth surface and uniform thickness was fabricated by vacuum thermal evaporation of Sn and subsequent thermal oxidation in oxygen ambient, and the influence of oxidation temperature on its morphology, structure and properties was investigated. The results showed that SnOx film is composed by nanocrystalline grains with homogeneous distribution and the grain size increases with oxidation temperature. In first cycle, the reversible capacity of this SnOx film decreases and capacity loss increases with the oxidation temperature. At 600 ℃ oxidation temperature for 2 h, SnOx film possesses best rechargeable property.
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