Optical Characteristic Analysis of the Failure Phenomena of Photoresist Nanostructure

Yang BAI,Xiaobo ZHANG,Ying XIONG,Gang LIU,Yangchao TIAN
DOI: https://doi.org/10.3969/j.issn.1003-5311.2016.09.021
2016-01-01
Abstract:Photoresist nanostructure owns unique optical property,and the structural parameters directly affect the opti-cal property.Structural failure occurrs in nano-grating with material in photoresist,such as spine tilt,collapse and adhe-sion,and its influence on the reflectivity of polarized light is researched.Through the modeling of three kinds of structural failure phenomena,the influence of various failure structures on the reflectivity of polarized light is calculated rigorous cou-pled wave theory.The results show that when nano-grating is tilted,the minimum wavelength to reflectivity of polarized light is shifted to red.When adhesion,the sensitivity of polarized light decreases and the diffraction orders are produced. Collapsed nano-gratings produce strong diffraction orders.The failure mode of nanostructures can be j udged according to the relationship between polarization change and failure mode.It is significant to realize the nondestructive monitoring of micro-nanostructures.
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