Characterization of anti-reflection structures fabricated via laser micro/nano-processing

Tong Chen,Wenjun Wang,Aifei Pan,Lei Hu,Xuesong Mei
DOI: https://doi.org/10.1016/j.optmat.2022.112686
IF: 3.754
2022-07-06
Optical Materials
Abstract:The optical reflection properties of material surfaces are crucial for the performance of many optical and optoelectronic devices. In this study, different single-scale surface structures, e.g., gratings, holes, and cones were fabricated via laser micro/nano-processing and their optical properties were determined. The anti-reflection mechanism for these surface structures was revealed visually by using a ray-tracing algorithm and wave optics calculations. To fully exploit the advantages of single-scale nanostructures or microstructures, a novel preparation method for multi/scale structures was proposed. It not only improves absorption efficiency, but also broadens the absorption spectrum. Moreover, a substantial improvement of the infrared anti-reflection performance was realized. In addition, the relationship between the characteristic of surface structure and the spectral region in response to incident light, was established.
materials science, multidisciplinary,optics
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