Preparation and Properties of N -Doped TiO2 Films by APCVD

ZHANG Xi-wen
DOI: https://doi.org/10.3969/j.issn.1007-4252.2006.03.005
2006-01-01
Abstract:Using TiCl_4,O_2 and NH_3 as the precursors,N-doped titanium dioxide films were prepared by APCVD.According to the results from SEM,X-ray diffraction(XRD) and the UV-VIS absorption spectrum,it is found that a new phase of Ti_4O_7 is formed in the thin film after nitrogen doping and the crystal transformation from anatase to rutile is inhibited.As well,a red drift of the absorption edge from 365.8nm to 402.6nm exists in the N-doped TiO_2 films and the visible-light induced photocatalysis and hydrophilicity are both enhanced.
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