Structures of Fe Nano-Particle Films Fabricated with MEVVA Magnetically Filtered Plasma Technique

CHENG Guo-an,LIU Hua-ping,ZHAO Yong,ZHENG Rui-ting,LIANG Chang-lin,CHEN Liang
DOI: https://doi.org/10.3321/j.issn:1004-0609.2005.11.030
2005-01-01
Abstract:The fabrication of Fe nano-films with MEVVA magnetically filtered plasma technique was investigated.The structures of Fe nano-films were systematically analyzed by the atomic force microscopy(AFM) and the field(emission) scanning electron microscopy(FESEM).The results show that the particle structures of Fe nano-film are well distributed because of the action of magnetic filter.The deposition angle of ions beam affects the microstructures of the films.The films with salient features become smooth and Fe nano-clusters are well distributed with the decrease of the deposition angle from 90° to 30°.Compared with the film produced under the normal incidence,the number of the large particles for films fabricated at the deposition angle of 30° decreases greatly and the nano-particles with better distribution and more uniform particle size are formed after high temperature treatment.
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