Abstract:[Co/Ni] multilayers with perpendicular magnetic anisotropy (PMA) have been researched and applied in various spintronic applications. Typically the seed layer material is studied to provide the desired face-centered cubic (\textit{fcc}) texture to the [Co/Ni] to obtain PMA. The integration of [Co/Ni] in back-end-of-line (BEOL) processes also requires the PMA to survive post-annealing. In this paper, the impact of NiCr, Pt, Ru, and Ta seed layers on the structural and magnetic properties of [Co(0.3 nm)/Ni(0.6 nm)] multilayers is investigated before and after annealing. The multilayers were deposited \textit{in-situ} on different seeds via physical vapor deposition at room temperature. The as-deposited [Co/Ni] films show the required \textit{fcc}(111) texture on all seeds, but PMA is only observed on Pt and Ru. In-plane magnetic anisotropy (IMA) is obtained on NiCr and Ta seeds, which is attributed to strain-induced PMA loss. PMA is maintained on all seeds after post-annealing up to 400$^{\circ}$C. The largest effective perpendicular anisotropy energy ($K_U^{\mathrm{eff}}\approx 2\times10^5$J/m$^3$) after annealing is achieved on NiCr seed. The evolution of PMA upon annealing cannot be explained by further crystallization during annealing or strain-induced PMA, nor can the observed magnetization loss and the increased damping after annealing. Here we identify the diffusion of the non-magnetic materials from the seed into [Co/Ni] as the major driver of the changes in the magnetic properties. By selecting the seed and post-annealing temperature, the [Co/Ni] can be tuned in a broad range for both PMA and damping.

Effects of Ru Seed Layer on Structural Properties of CoCrPt-SiO2 Perpendicular Media

The Influences of Ru Seed Layer Microstructure on Structural Properties of CoCrPt-SiO2 Perpendicular Media

Ru+oxide Interlayer for Perpendicular Magnetic Recording Media

NiW/Ru Underlayer for CoPt-SiO2 Granular Perpendicular Recording Media.

Magnetic Film Thickness Effects on the Recording Performance of Perpendicular Media

Microstructure and Magnetic Properties of the Coptru-Sio2 Single and Coptru-Sio2/Co72pt28-Sio2 Double Layer Nanocomposite Films

Effect of Zr Incorporation on Microstructure and Properties of Magnetron Sputtered RuZr Thin Films

Effects Of Ruthenium Seed Layer On The Microstructure And Spin Dynamics Of Thin Permalloy Films

Development of ${\rm L}1_{0}$ FePt:C (001) Thin Films with High Coercivity and Small Grain Size for Ultra-High-Density Magnetic Recording Media

Ruthenium Barrier/Seed Layer for Cu/Low-κ Metallization

Granular L1 FePt:TiO2 (001) Nanocomposite Thin Films with 5nm Grains for High Density Magnetic Recording

Granular L1(0) Fept : Tio2 (001) Nanocomposite Thin Films With 5 Nm Grains For High Density Magnetic Recording

Seed Layer Impact on Structural and Magnetic Properties of [Co/Ni] Multilayers with Perpendicular Magnetic Anisotropy

FePt-Si-N nano-granular thin films with improved structure and magnetic properties for high-density recording medium

Low-temperature Deposition of L10 FePt Films for Ultra-High Density Magnetic Recording

Influence of Intermediate Layer on Magnetic Properties of $l1_{0}$ordered FePt Perpendicular Recording Media

Grain Refining and Decoupling in FePt/SiO $_{2}$ Nanogranular Films for Magnetic Recording

Effects of Thickness Ratio of Co to Pt Layer on Magnetic Properties and Microstructure of [Co/Pt]n Multilayer Films

Intra-grain perpendicular percolated L1₁ CoPt thin films

EFFECT OF PREPARATION CONDITIONS OF Pt UNDERLAYER ON THE MAGNETIC AND MAGNETO-OPTICAL PROPERTIES OF SPUTTERED CoPt ALLOY FILMS

Effect of the Seed Layer on the Y0.5Gd0.5Ba2Cu3O7-σ Film Fabricated by PLD