EFFECT OF PREPARATION CONDITIONS OF Pt UNDERLAYER ON THE MAGNETIC AND MAGNETO-OPTICAL PROPERTIES OF SPUTTERED CoPt ALLOY FILMS

Ming Li,Zhi-Hong Jiang,Kun Xun,Zhi-Qiang Zou,De-Fang Shen
DOI: https://doi.org/10.3379/jmsjmag.22.s2_137
1998-01-01
Abstract:CoPt alloy films with perpendicular magnetic anisotropy and saturated remanence ratio were prepared on glass substrates with and without Pt underlayer by sputtering a composite target. The influences of Pt underlayer and its preparation conditions on the magnetic and magneto-optical properties or CoPt alloy films were investigated. It was found that the introduction of Pt underlayers could improve the magnetic properties of CoPt alloy films but the Pt underlayers must be prepared at low sputtering pressure (<2 Pa) or high sputtering pressure while the substrates were heated so that the underlayers and further the alloy films had good f.c.c. (111) crystalline orientation.
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