Investigation on mechanical property of HFCVD boron-doped composite diamond film

Xinchang WANG,Xiaotian SHEN,Fanghong SUN,Bin SHEN
DOI: https://doi.org/10.13394/j.cnki.jgszz.2015.6.0002
2015-01-01
Abstract:The composite diamond films combining typical merits of different types of monolayer diamond films show excellent comprehensive performance In this article mechanical properties of UMCD BDMCD UFGCD and two novel boron-doped composite diamond films were respectively evaluated and compared Research results showed that the boron doping technology could significantly improve the film-substrate adhesion so BDM-UMCD and BDM-UM-UFGCD films both presented favorable adhesive strength The surface layer of the BDM-UMCD film was UMCD layer consequently such the composite film had extremely high surface hardness 84 354 GPa similar to the monolayer UMCD film 82 058 GPa relatively high surface roughness R a 304 41 nm and bad polishability By contrast the BDM-UM-UFGCD film with the UFGD layer as the surface performed nice surface smoothness R a 104 71 nm and polishability as well as relatively higher surface hardness 72 657 GPa than the monolayer UFGD film 67 925 GPa attributed to the reinforcement effect of the ultra-hard middle UMCD layer.
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