Abstract:The presence of strong ambient vibrations could have a negative impact on applications such as high precision inertial navigation and tilt measurement due to the vibration rectification error (VRE) of the accelerometer. In this paper, we investigate the origins of the VRE using a self-developed MEMS accelerometer equipped with an area-variation-based capacitive displacement transducer. Our findings indicate that the second-order nonlinearity coefficient is dependent on the frequency but the VRE remains constant when the displacement amplitude of the excitation is maintained at a constant level. This frequency dependence of nonlinearity is a result of several factors coupling with each other during signal conversion from acceleration to electrical output signal. These factors include the amplification of the proof mass's amplitude as the excitation frequency approaches resonance, the nonlinearity in capacitance-displacement conversion at larger displacements caused by the fringing effect, and the offset of the mechanical suspension's equilibrium point from the null position of the differential capacitance electrodes. Through displacement transducer and damping optimization, the second-order nonlinearity coefficient is greatly reduced from mg/g2 to μg/g2.

The Effects of External Vibration on the Dynamic Balance Measurement of the Precision Centrifuge

The Effect on Dish Centrifuge'dynamical Characteristic of the Unbalance Weight of Rotor

Analysis on Dynamic Characteristics and Design of Centrifuge

Rigid Rotor Dynamic Balancing with the Influence Coefficient Method

Rigid Rotor Dynamic Balancing by Two-Plane Correction with the Influence Coefficient Method

Extraction Of Unbalance Signals From Miniature-Rotor Dynamic Balancing Machine

Development Of Vibration Environment For Calibration Ultra-Low-Frequency Seismometers

Analysis of the Frequency-Dependent Vibration Rectification Error in Area-Variation-Based Capacitive MEMS Accelerometers.

Testing System of Characteristics of Electrical Vibration Table

A Three-dimension High-Precision and Non-contact Dynamic Angular Displacement Measurement System based on Heterodyne Interference

The Design of Dynamic Balancing Machine Based on Finite Element Analysis

Research on angular vibration measurement system based on heterodyne interference

Thermal-Vibration Combined Environment Under High Linear Acceleration

Study on Test System of Thermal-Vibration Combined Envir Onment under High Linear Acceleration

Dynamic Balancing of a Centrifuge: Application to a Dual-Rotor System with Very Little Speed Difference

The Design Study of Single Plane Vertical Hard Bearing Dynamic Balancing Machine

Synchronization Identification Method for Unbalance of Dual-Rotor System

Research on the Field Dynamic Balancing Technology and Instrument for a High Speed Cantilever Rotor

Non-whole beat correlation method for the identification of an unbalance response of a dual-rotor system with a slight rotating speed difference

Design and Experimental Research of a Non-Destructive Detection Device for High-Precision Cylindrical Roller Dynamic Unbalance

Auto balance of active magnetic bearings for rotor support system by means of unbalance identification