Design, Fabrication and Actuation Performance of PyroMEMS Safe and Arm Device Based on Silicon Double Solid Beams

Gang HOU,Peng ZHU,Yu LI,Rui-qi SHEN,Ying-hua YE
DOI: https://doi.org/10.11943/j.issn.1006-9941.2018.03.011
2018-01-01
Chinese Journal of Energetic Materials
Abstract:To meet the development requirements of miniaturization and high reliability of weapon and ammunition safety system,a safe and arming device of pyrotechnical micro-electro-mechanical system(PyroMEMS) based on silicon double solid beams was designed.The compressive strength and overload strength of the solid beam in the safe and arming mechanism layer were simulated by using ABAQUS software.The principle prototype of safe and arming device of PyroMEMS was fabricated using micro-electromechanical system(MEMS) technology according to the simulation results.In order to study its actuation performance,the Si/Pb3O4 mixture of mass ratio as 1:9 was selected as ignition powder and the C6H2(NO2)3OK/KCIO4 mixture of mass ratio as 1:1 was selected as gas generator.Results show that the compressive strength is 310.03 MPa and the overload strength is 47.31 g as the boh length size and width size of silicon double solid beams in the safe and arming device are 300 μm.The designed PyroMEMS S & A device can successfully realize safe and arming functions.
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